CYMECHS

Gyeonggi-do, 
Korea (South)
http://www.cymechs.com
  • Booth: C456


Dream on. Everything is possible with Cymechs!

CYMECHS is a venture company that produces and supplies wafer handling robots and transfer chambers required for the entire semiconductor process. As the only producer of semiconductor vacuum robots, we export our products to the US and Japan.


 Products

  • Vacuum Cluster Tool
    Cymechs provides the Aries series of 300mm vacuum transfer module. Available in 4, 6 and 7 sided configurations, the Aries Transfer module features a compact footprint while maintaining Cymechs’s world reputation for high reliability and durability....

    • Model: Aries series
    • Vacuum Robot
    • Load-Lock
    • Available the Cooler & Pre-Heater (option)
    • PM Utility Line in TM Frame
  • EFEM
    PHOENIX Series Design Footprint optimally FFU RPM MODE, Pressure MODE Possibility to install PM-ELEC RACK on the top of EFEM....

    • PHOENIX-P200 : Install 2LPM
    • PHOENIX-P300 : Install 3LPM
    • PHOENIX-P400 : Install 4LPM
    • PHOENIX-P300-450(450mm) : 2LPM (Possibility 3LPM)
  • Load Port Module(LPM)
    DURAPORT Series Up / Down Mapping Various Safety Interlock Wafer ID Reading applied by RFID...

    • DURAPORT-DE-300
    • DURAPORT-DMN2-300
    • DURAPORT-DP-450(450mm)
    • DURAPORT-ND (N-DURAPORT)
  • Robot (ATM Robot, VTM Robot)
    QUADRA Series...

    1. ATM Robot: QUADRA-QA-34,-44
    • 200mm, 300mm Wafer
    • Single arm(3 axis), Dual arm(4 axis)
    • End Effector type : Vacuum grip, Edge grip, Passive
    1. VTM Robot: QUADRA-QV400, -QV600
    • 200mm, 300mm wafer
    • Dual arm (4 axis), Quad arm (6 axis)

     

  • Aligner
    VEGA Series Wafer Notch Finding & Centering Center DELTA PICK & PLACE Mode...

    • VEGA-300C-V : VACUUM GRIP Type
    • VEGA-P300N-PS : PASSIVE Type

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