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COMET

Suwon-si, Gyeonggi-do, 
Korea (South)
http://pct.comet.tech
  • Booth: B212


Welcome to the Comet booth at Semicon Korea 2023!

Stop by at booth #B212 to discover Synertia®, Comet’s integrated RF Power Delivery platform that enables the unprecedented power delivery control required by plasma process tools for the next generation of microchips.

Comet Plasma Control Technologies (PCT) develops, manufactures and markets high-end radio frequency power components and systems solutions for the precise control of plasma applications that are necessary to manufacture advanced microchips.

We offer

  • RF Matching Networks
  • RF Generators
  • Vacuum Capacitors

Comet – We empower new technologies.

The Comet Group is a globally leading, innovative technology group with a focus on RF power plasma control and x-ray technology. With premium high-tech components and systems, we enable our customers to make a growing contribution to a safer, more efficient and sustainable world. Headquartered in Flamatt, Switzerland, the Comet Group has a presence in all world markets. In our 15 worldwide locations we employ more than 1,500 people.

 Products

  • Step up your system with Comet RF Power Solutions
    Comet Plasma Control Technologies develops/manufactures high quality vacuum capacitors, high-performance RF generators and impedance matching networks used for precise control of plasma processes like thin-film deposition and etching for semiconductors....

    • Comet RF Generators: At the Heart of Advanced Power Delivery
    Comet offers full feature RF generators from 13 MHz to 100 MHz and power from 600 W to 7 kW with pulsing and precise power control. Our expert team provides the RF solution you need with robust designs resulting in greater operating efficiency, stability and reliability, lower heat build up and lower power consumption.

    Impedance Matching Networks: Designed to meet Current and Future Needs 
    Comet offers standard and custom RF matching networks. Our sensors and controls combine to make some of the fastest tuning matching networks in the industry. Unlike other matching network suppliers, Comet has a full line of variable vacuum capacitors and the experts who design these key components. Comet’s Vacuum Capacitor and Matching Network designers work closely together to create products that no other competitor can offer.

    Comet Vacuum Capacitors: Combining Expertise and Technology
    Get to know the latest generation of Comet vacuum capacitors with higher power density that address more sophisticated applications and production processes for customers.
  • New vacuum capacitor solutions
    Discover our new generation of motorized Capacitors with the latest integrated drive technology for vacuum capacitors and a new hybrid-cooling technology that allows the use of high current in a compact size vacuum capacitor...

    • Universal Motorized Capacitor

    Motorized Capacitors are the ideal solution for high-precision operation. Besides ensuring highest accuracy, capacitors with integrated drive system simplify procurement with an easy-to-install subsystem. The core component of the Universal Motorized Capacitor is a Comet variable vacuum capacitor, which includes an insulating cover, coupler and stepper-motor to drive the capacitor. A durable, backlash-free coupler connects the capacitor to the drive system. Assembled flanges ensure easy mounting in the system. Appropriate high-voltage insulation between the capacitor and the mounting flanges is also included.

    Vacuum Capacitor with hybrid-cooling technology

    Comet hybrid-cooling technology has been developed as an extension of the well-known Hexa-Con product range. The first hybrid-cooled, small size capacitor series offers users the best of both worlds: the compact size allows the use of higher power within the same matchbox size, and users profit from reduced total cost of ownership at the same time. When comparing diameter versus power density, the Hexa-Con series with hybrid-cooling technology is best in class.

    Xtra Volt Vacuum Capacitors for low frequency applications

    With the XtraVolt low frequency vacuum capacitor product range Comet meets these needs with higher voltage capability compared to standard products. This allows significant higher voltage in a compact size vacuum capacitor keeping the same form factor. The new XtraVolt low frequency vacuum capacitors with higher field strength capability can achieve higher voltage. This allows increased RF current capability and higher power density.

  • Comet RF Generator cito Plus
    cito Plus has taken Comet’s RF generator program to the next level in performance and precision. With superior pulsing quality, stability and power measurement accuracy, it is designed for the highest stability into dynamic loads....

    • cito Plus’s fully integrated approach to the newest technology platforms of the semiconductor industry is also highly suitable for upgrading older plasma systems.

    The cito Plus new levels of accuracy enable plasma processes to be controlled with previously unattainable precision. Together with improved RF stability, users can fully optimize their plasma equipment, and take advantage of ideas for new technologies and products. With cito Plus, our customers benefit not only from predictable plasma behavior and system integration, but also from repeatable wafer-to-wafer results and stable operation using any cable length. 

  • Comet Impedance Matching Networks
    Comet offers standard and custom RF matching networks. Our sensors and controls combine to make some of the fastest tuning matching networks in the industry....

    • Designed to meet Current and Future Needs

    Comet offers standard and custom RF matching networks. Our sensors and controls combine to make some of the fastest tuning matching networks in the industry. Unlike other matching network suppliers, Comet has a full line of variable vacuum capacitors and the experts who design these key components. COMET’s Vacuum Capacitor and Matching Network designers work closely together to create products that no other competitor can offer.
  • Comet Vacuum Capacitors
    Broadest selection of capacitance, power, voltage and drive systems in the market. Produced with the best materials, fabrication processes and quality standards....

    • The design, construction and processing of Comet Vacuum Capacitors combined with decades of experience in precision manufacturing assure outstanding quality standards. The unique modular design of the capacitors allows a high degree of flexibility in production and guarantees delivery of special types on very short notice. The superior performance and reliability of the products have been proven by hundreds of thousands of units in operation at customers worldwide. For performance reasons all capacitors are made with ceramic envelopes, which enable the capacitors to withstand higher thermal and mechanical loads than glass. The universal design matches with a wide range of sockets and most units are electrically and mechanically compatible and interchangeable. 

Categories

307 Materials, Process
  • Deposition Supplies
  • Plasma; Ion Sources
    • 401 Sub-systems
  • Power Supplies; RF Generators; Converters; Electrical Conditioning
  • Ultrasonic Generators; Transducer and Monitoring Systems
    • 701 Manufacturing Services or Consulting
  • Equipment; Hardware; Product Design, Integration and Manufacturing
    • 903 LED
  • OLED Related Equipment and Materials, Panel and Module


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