SK trichem Co., Ltd.

  • Booth: C652

SK trichem moves forward as a Total Solution Provider in Semiconduct Precursor industry.

SK trichem was established in 2016. It is a semiconductor precursor jointed venture with SK materials, one of the Koreas top specialty gas maker, and TCLC which has the leading precursor development technology in Japan. Our main business is the production of high purity precursors for the semiconductor industry. SK trichem, based on the trust and customer responsiveness of the SK materials and technology of TCLC, we will continue to fulfill our role as a major growth leader in the future through the integration of precursor technology.


  • SKZ2000, BTBAS, TiO2, CpHf, 3DMAS
    SK trichem manufactures and sells Zr-Precursors, Si-Precursors, Ti-Precursors and Hf-Precursors based on consistent research and development on specialized materials for next-generation processes....

  • Precursors, which induce chemical reactions by introducing various types of reactive gases into reactors during semiconductor fabrication, are used to deposit thin films of desired materials is expected with the refinement of semiconductors and the increase in layered structures.
    *. Zr-Precursors: Zr-precursors are used in the manufacturing of capacitors for semiconductor DRAMs and in the depositing of ZrO2 thin films in the ALD process.
    *. Si-Precursors: Si-precursors are used in the manufacturing of semiconductor DRAMs and 3D-NAND and in the depositing SiO2 thin films in the CVD/ALD process.
    *. Ti-Precursors: Ti-precursors are used in the manufacturing of capacitors for semiconductor DRAMs and in the depositing TiO2 thin films in the ALD process.
    *. Hf-Precursors: Used in the fabrication process of DRAM capacitors for semiconductor devices. Also used in HfO2 thin-film deposition as part of the ALD process.

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