* High-temperature catalytic processing facility that combines the fluorine catalyst oxidation technology with wetting technology to simultaneously process combustible and soluble gas and NF3 at hihg efficiency.
* Using electric heater and waste gas reaction heat without separate fule(LNG) Combustion, it causes very low thermal Nox by oxidaizing waste gas.
* Cartridge can be manintanied conveniently while minimizing contanmination in FAB by applying a swap methold for exchanging and retrieving Cartridge in the field without cleaning.