Application
- Isolation for vacuum line and vacuum pump
- Semiconductor and FPD manufacturing system
- Various type available : standard, protection, manual
with optional direct heating technology
Features
- Protection Gate Valve (Normal/Heating)
- Manual protection Gate Valve (Normal/Heating)
- Suited for harsh process
- Soft pumping function (Auto/Protection type)
Advantage
- Rapid Closing (protection type)
- Avoid contamination (shutter mechanism type)
- High temp heating(Max 180 ℃)
General Specifications
|
Pressure Range
|
ATM to 1.0 · 10-7 mbar to 1.2 bar
|
Leak Rate
|
Seat
|
1 x 10-9 mbar. l/s
|
Body
|
1 x 10-9 mbar. l/s
|
Material
|
Body
|
AL6061,SS304
|
Disc
|
AL6061
|
Operating Temperature
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0℃~120℃
|
Seal O-ring
|
VITON(Optional FFKM)
|
Cycle until first service
|
DN50 ~ DN100 : 50,000
DN100~ DN200: 10,000
|
Open/Close indicating
|
manual / Position Sensor
|
Close/Open time
|
1.0~2.0 sec (normal type)
|
0.3~0.6 sec (Protection type)
|