The NEW EAGLEi Series was designed to automatically verify critical wafer carrier dimensions. Fabs use the EAGLEi series to quickly identify out-of-tolerance carriers through in-coming and in-process inspection. Removing carriers that do not meet specification will improve wafer transfers, maximize equipment availability, and enhance overall yield through a reduction in wafer breakage and particle contamination.
Automatically verifies critical wafer carrier and FOUP dimensions.
Provides incoming and in-process inspection
Compares measurements to carrier manufacturer specifications or your own
Identifies out-of-tolerance wafer carriers
Reduces wafer carrier and FOUP interoperability issues
Windows® 10 operating system
Hi Resolution, flat panel screen
All new components