See the unseen
Leading advanced process control with patented Harmonic series optical technology.
Founded in 2011, Femtometrix® is the world leader in the optical Non-Visual Defect (NVD) category for surface and buried defects, delivering new metrology capabilities with its patented Harmonic series technology.
Harmonic® Series
Metrology System
Tool Capabilities
Unique Novel Technology
Non Destructive Optical Technique
Sensitive Non Visual Defect Detection
High In-Line Throughput
Characterizes Critical Dimensions and Buried Interfaces
Patterned and Unpatterned Wafers
Easy to Use and Interpret Software
Overview
Our Harmonic series metrology systems enable fabs to improve yield by detecting Non-Visual Defects (NVD) optically. These include yield-killing non-uniformities that cannot be seen by other in-line tools.
Whether you're in a high-volume, advanced fab, in pilot production, development or a research lab, there's a Harmonic series tool that will enable you to improve yield and increase fab profitability.
Technology
The Harmonic series uses Optical Second Harmonic Generation (SHG). The technique is a non-destructive, contactless, optical characterization method for characterizing surfaces, interfaces, thin-films, as well as bulk properties of materials.
Product
The Harmonic series utilizes Second Harmonic Generation to characterize critical dimensions, stress/strain, layer thickness, electrically active impurities, structural defects, interface roughness and trapped charge density.
The resulting maps provide measurement of global uniformity and detection of localized defects. By design, Harmonic series technology offers great flexibility and accommodates a wide range of materials and processes.
News
Femtometrix® (R) Closes B-Round of Financing.
Femtometrix has closed its Series-B round of equity Financing. The company raised approximately $12 M in a round syndicated with SK hynix and NASA/JPL.
Femtometrix® Closes Series A Financing Round Led By Samsung Ventures
At the end of August, 2016, Femtometrix completed its first round of equity financing in a deal led by Samsung's Venture Division. The round included financing from other related parties.
Femtometrix® Closes Financing From SK Telecom Ventures.
In addition to the investment, Femtometrix welcomes Heejin Chung, head of Venture Investments at SK hynix to the Board of Observers.
Femtometrix® Announces License Agreement With Boeing
"When we can redeploy our technology to help another company accelerate their innovation, we consider that a success," said Peter Hoffman, Boeing Vice President of Intellectual Property Management.