MFC is a key component that wants to use gas flow rate precisely of plasma and dryer such as display/semiconductor. MFCs that require precise and rapid adjustment of gas mass, and MFCs that apply technologies of Thermal Type and Pressure Type depending on sensors that accurately detect the gas component.
2. Main feature
- High Accuracy & fast response time
- Strong corrosion resistance by electro polishing surface treatment
- The range of flow control is wide