RTCK Co., Ltd.

- Features
1. In-line / Real time measurement
2. User-friendly maintenance. In addition, it is possible to check the product condition with its self-diagnostic function
3. Ultrasonic has a wide range of responses compared to the conductivity rate or refraction rate.
4. Superior customer service based on over 40 years sales experience
5. Output systems [Analog, digital, & alarms]

- Advantages
1. This product enables real time controlling system easily and the concentration control system is simplified by the concentration output as well as the alarm output and error output on the indicator, recorder and computer. 
2. This product is independent of color, flow rate, and din(sound noise), because it uses ultrasonic.
3. It does not contaminate the solution, and has an user-friendly maintenance. 
  Various transducer materials are available for protection against chemical corrosion.
SUS316(L)ㆍSUS304(L)ㆍPFA Coating
HastelloyㆍTitaniumㆍNickelㆍTantalumㆍPFAㆍPTFEㆍPVCㆍPVDF, etc

- Applications
Pharmaceutical manufacturing process for the ionic industry : NaOH, NaCI, HCI, NaCIO, etc.
Chemical plants : H2SO4, HF, TMAH, HNO3, NH4OH, etc
Steel plate plant : Coolant oil, Oil remover etc
Synthetic fiber plant : Primary material, Oiling agent etc.
Food / Beverage plant : Sugar(BX), Ingredients, etc
Other industries : Cleaner, Etchant, etc

M-13 is able to measure concentration of binary liquids (one measurement subject in a base liquid) with ultrasonic propagation velocity principle. Moreover, it does not require any periodical calibration because of no long time degradation of piezoelectric element. It is available for variety applications such as acid, alkali, and organic fluids with minimum effort for installation and operation.

- Features
1. In-line / Real time measurement
2. User-friendly maintenance. In addition, it is possible to check the product condition with its self-diagnostic function
3. Ultrasonic has a wide range of responses compared to the conductivity rate or refraction rate.
4. Superior customer service based on over 40 years sales experience
5. Output systems [Analog, digital, & alarms]

- Advantages
1. This product enables real time controlling system easily and the concentration control system is simplified by the concentration output as well as the alarm output and error output on the indicator, recorder and computer. 
2. This product is independent of color, flow rate, and din(sound noise), because it uses ultrasonic.
3. It does not contaminate the solution, and has an user-friendly maintenance. 
  Various transducer materials are available for protection against chemical corrosion.
SUS316(L)ㆍSUS304(L)ㆍPFA Coating
HastelloyㆍTitaniumㆍNickelㆍTantalumㆍPFAㆍPTFEㆍPVCㆍPVDF, etc

- Applications
Pharmaceutical manufacturing process for the ionic industry : NaOH, NaCI, HCI, NaCIO, etc.
Chemical plants : H2SO4, HF, TMAH, HNO3, NH4OH, etc
Steel plate plant : Coolant oil, Oil remover etc
Synthetic fiber plant : Primary material, Oiling agent etc.
Food / Beverage plant : Sugar(BX), Ingredients, etc
Other industries : Cleaner, Etchant, etc

ProSys Megasonic cleaning systems and transducers provide superior cleaning performance, substantially higher reliability, and a lower cost of ownership for manufacturers of submicron contamination-sensitive products.Megasonics is our core and only business. Our company focuses on delivering innovative technology with exceptional performance at a competitive cost. The Sapphire MegPie is a single-wafer Megasonic transducer for cleaning and sonochemical processing. It applies a uniform dose of acoustic energy to a rotating substrate. The MegPie will improve process efficiency and lower process time. It is easy to retrofit to your single-substrate(Wafer)processing tool.

Features & Benefits
-Particle-neutral sapphire resonator
-no particles added to the process
-Patented crystal bond to the resonator 
-Patented RF connection to the crystal
-Redundant internal RTD temperature monitoring
-Available in 100mm to 450mm+
-Custom sizes available
-Sapphire resonator compatible with all processing chemistries
-Uniform direct acoustic energy applied to the process
-Increased process efficiency
-Reduced process time
-Reduced process chemistry usage
-No moving parts to maintain
-No consumables ? works better than brushes

Technical Specifications
-Power density: 0.05 ? 2.0 Watts/cm2
-Standard operating frequency: 925 kHz; other frequencies available on request
-Mounting height: 0.02? ? 0.14? (0.5mm ? 3.5mm)
-Process fluid temperature: 15°C ? 60°C
-Process fluid required depends on the substrate size and RPM: (0.5 ? 3.0 lpm)
-Operating RPM: 1?100
-Nitrogen or CDA purge: 10 lpm
-Mounting with 3 x M6 female threaded bosses
-Use with IMPulse RF electronics

Process Technology introduces the next generation ultrapure water heater designed for the next generation high purity semiconductor and flat panel display manufacturing processes. This  d Lufran water heater offers the ultimate in cleanliness for heating UPDI (ultrapure deionized water). 
With thousands of heater installations worldwide, the Lufran boasts proven technology for UPDI heating applications and is suitable for the most stringent high purity specifications. It is constructed with all PTFE and PVDF wetted parts for ultra-low particle count processes. Its patented “purged” resistive element design offers exceptional MTBF of nearly ten years and significantly lower maintenance costs than other ultrapure water heaters on the market. 
This heater is Class 100 cleanroom assembled, certified to SEMI S2/S3, and optionally CE compliant.

- Benefits
MTBF: 9.39 years
Temperature: Distributive zero crossing SSR switched by PLC based DAC™ “Demand Anticipation Control” (DAC available on Lufran only).
Temperature Sensors: “J” type thermocouple (process), “E” type (element over-temperature), or customer specified. Redundant safety features ensure long, trouble-free life.
Wetted Surfaces: 
Heating elements: continuous virgin PTFE Polytetrafluoroethylene (82%).
Chamber and plumbing: PVDF Polyvinylidine Fluoride (18%)
Chemraz® o-rings
No wetted metal or coated metal parts
Heating Element: Patented design utilizing a precision resistance wire, 15 w/in² (2 w/cm²) watt density.
Element Gas Purge: Removes permeation to extend element life expectancy. Monitors integrity of element tubing.
Exhaust Ventilation: Not required.

- Standard Features
DAC™ “Demand Anticipation Control” (run by a PLC, available on LUFRAN only)
EMO circuit (local and remote)
Ground fault protection (GFP) 
Fused 24 VAC control circuitry
Built to UL Standards, SEMI S2/S3, RoHS compliant
Disconnect
USB Data logging
Powder coated cabinet with sump leak detection
Capacitive liquid level sensor for element protection
Heater over temp circuit with independent limit control
Humidity monitor to verify element tubing integrity
Purge flow switch to verify element purge
System pressure monitor
Process high temperature alarm
PVDF mechanical pressure relief valve set @ 100 PSIG (689.5 kPa)

- Specifications
Heater: Patented resistive heating system. 
Controller: DAC™ Demand Anticipation Control) for high temperature accuracy.
Controller: PID
Sizes: 24kW to 312kW. Voltages: Up to 600 volt (three phase) available. Heaters can be utilized in combination.
Temperature Limit: 95°C, depending on operating conditions.
Temperature Accuracy: +/-0.3°C, depending on operating conditions.
Temperature Accuracy: +/-3°C, depending on operating conditions.
Flow Rate: 1 LPM (.25 GPM) to 200 LPM (50 GPM). 
Efficiency: 99%
Pressure Rating: 100 PSIG (6.89 kPa) maximum operating.

1. Size: 1,000 watts ~ 18,000 watts
2. Voltage: 200V ~ `600V, Single or three phase(12kW and larger require three phase.)
3. Watt density: 10 watts per square inch(1.5w/cm2)
4. Fluid Connections: ¼-inch (6mm) to 1-inch (25mm); ½-inch (12mm) to 1-inch (25mm) Super 300 Type Pillar
5. Element Purge: Small amount of clean dry air (CDA) or N2 gas flows between the metal grounded element and the PTFE sheath. Purge minimizes potential for ionic contamination. Removes chemical permeation for longer service life

-Features
1. Ruggedly designed for the most demanding recirculation or single pass chemical applications.
2. Able to achieve the highest temperature heating, up to 210°C. 
3. All fluoropolymer wetted surfaces for virtually any wet chemistry application. Thick walled chamber provides long service life in the harshest high temperature applications. 
4. Long heater life for reduced cost of ownership (COO): Patented heater gas purge system continuously removes any chemical permeation and ensures long element life. 
5. Certification: CE, UL, Semi S2 and S3

Levitronix® has developed a revolutionary centrifugal pump that has no bearings to wear out or seals to break. Based on the principles of magnetic levitation, the pump’s impeller is suspended contact-free inside a sealed casing and is driven by the magnetic field of the motor.

The impeller and casing are both fabricated   chemical resistant, high-purity fluorocarbon resins. Together with the rotor magnet they make up the pump head. Fluid flow rate and pressure are precisely controlled by electronically regulating rotor speed and eliminates pulsations.

1. Bearingless Pump Design
By eliminating a mechanical bearing, no mechanical friction occurs that could cause local hotspots. Moreover, no narrow gaps exist where metal other particles could precipitate. The low-shear, dead-zone-free pump design and the smooth, wetted plastic surfaces further aid in avoiding deposition in the pump.

2. Perfect Match to Your Flow and Pressure Requirements
Levitronix® bearingless pump systems all come with variable speed control so that the pump speed can be  ed to optimally mach your operating point. Compared to mag-drive pumps which are operated with a variable frequency inverter, significantly higher speeds can be achieved since there are no limiting mechanical slide bearings. This feature allowed Levitronix® to design pumps with much higher pressure capabilities compared to mag-drive pumps. Levitronix® pumps are ideally matched to the typical pressure requirements of filtered recirculation loops. This provides you with the reserves needed to run your filters up to the recommended change out pressure with the added benefit of significant cost savings.

3. Save on Your Electric Bill
The optimal match between pump speed and pump operating point ensures that you are always able to operate your pump at the point of greatest efficiency. This can result in significant energy savings compared to the typical throttling control of a fixed frequency pump.