02-531-7800

New Power Plasma Co., Ltd.

Gyeonggi, 
Korea (South)
http://www.newpower.co.kr
  • Booth: C356


Welcome to New Power Plasma Co., Ltd.

Since establishment in 1999, New Power Plasma Co., Ltd. has been doing its best for R&D in order to satisfy the rapidly changing market environment and customers needs.

Based on our unique technology, we are focusing on technology development with the strong will to dominate the world market. It has been  ed as one of Koreas top 10 new technology and world-class products through localization of RF Generator (Plasma Power Supply), Matching Network (Impedance Matching), and Remote Plasma Cleaning Generator (RPG). In particular, we developed and localized RPG products as the second pioneer in the world. We are raising the dignity of Korean companies in the competition with global companies and developing unique technical skills every year.

In addition, we will continue to R&D technology-intensive and eco-friendly products to become the worlds best company, and all our employees will give continuous efforts to be as a company that does its best for the satisfaction of customers.


 Products

  • Remote Plasma Generator (RPG)
    RPG is a product that quickly and reliably removes by-products remaining in the chamber after deposition process such as CVD process using high density plasma...

  • 1. Process GAS : NF3, C2F2, C3F8, SF6, CHF, O2, N2, ...
    2. Cleaning Process : PECVD, HDPCVD, PEALD/ALD, ACL, ...
    3. Power Capacity : 6kW ~ 30kW
    4. Max Flow Rate (NF3 Base) : 4 ~ 100slm
  • RF Generator
    The RF Generator provides high frequency power where RF Plasma generation is required....

  • 1. Frequency : 370~450kHz, 2MHz, 3.2MHz, 4MHz, 13.56MHz, 27.12MHz, 60MHz, 100MHz
    2. Power Capacity : 100W ~ 90kW
    3. Function : Dynamic Response, Ramping, Pulsing, Arc Detecting, HALO, Pulse sync, Clock sync, PTC, AFT
    4. Protection : Reflect, Voltage, Current, Temperature, Case open, RF Cable, etc.
  • Matching Network
    Products that match impedance at RF Load...

  • 1. Frequency : 370~450kHz, 2MHz, 3.2MHz, 4MHz, 13.56MHz, 27.12MHz, 60MHz, 100MHz
    2. Power Capacity : 100W ~ 90kW
    3. Function : Model Base Predict, Step Motor Non-linear, FFT, Pusle Mode
    4. Communication : RS232, D-NET, EtherCAT

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