EGTM CO. LTD

Suwon-si,  Gyeonggi-do 
Korea (South)
http://www.egtm.co.kr/
  • Booth: A648


 Products

  • Zr precursor
    ZAC, SZ-400, SZ-1200, SZ-1300, SZ-1400...

  • 제품명 V.P. ( ℃ / torr ) T½ (℃) 점도 (cP) 비고
    ZAC 110 / 1 185 8.4 High-k
    SZ-400 110 / 1 185 4.1
    SZ-1200 145 / 1 221 18.5
    SZ-1300 144 / 1 222 3.89
    SZ-1400 163 / 1 242 7.28
  • Ge precursor
    GE-100, GE-200...

  • 제품명 V.P. ( ℃ / torr ) T½ (℃) 점도 (cP) 비고
    GE-100 126 / 1 200 3.43 Dopant &
    New memory
    GE-200 135 / 1 208 11.3
  • Hf precursor
    HAC, SH-200, SH-300, SH-400...

  • 제품명 V.P. ( ℃ / torr ) T½ (℃) 점도 (cP) 비고
    HAC 93 / 1 178 14.3 High-k
    SH-200 150 / 1 213 17.6
    SH-300 141 / 1 209 6.46
    SH-400 163 / 1 240 7.2
  • Nb precursor
    TBTDEN, SN-200, SN-300...

  • 제품명 V.P. ( ℃ / torr ) T½ (℃) 점도 (cP) 비고
    TBTDEN 91 / 1 207   High-k
    SN-200 137 / 1 229  
    SN-300 - 189  
  • Si precursor
    PS-100, PS-300, PS-400 OMCTS...

  • 제품명 V.P. ( ℃ / torr ) T½ (℃) 점도 (cP) 비고
    PS-100 155 / 1 239 - Dopant
    PS-300 77 / 1 172  
    PS-400 - 164  

    제품명 Assay (%) Purity (%) Color 비고
    OMCTS 99.984 99.99999 Colorless Low-k

  • Ti precursor
    TI-100, TI-400...

  • 제품명 V.P. ( ℃ / torr ) T½ (℃) 점도 (cP) 비고
    TI-100 147 / 1 218 2.6 Barrier metal
    TI-400 170 / 1 250 2.74

BEWARE - Special Warning Notice about ExpoGuide and FAIRGuide

With the ongoing solicitations, SEMI would like to continue to alert you with questionable professional practices perpetrated against exhibitors by FairGuide.com (Austria) and Expo Guide (Mexico), Event Fair - The Exhibitors' Guide with their misleading directory services. There may be others that we are not aware of and are hence not named here. 

These companies provide legitimate exhibition guides aimed at exhibitors across the globe offering online listing services. They use a form which resembles and organizer's free catalogue listing service, inviting exhibitors to complete the form for an entry in an on-line directory. Unsuspecting exhibitors who sign and return the form are then contracted into a three-year, non-retractable agreement, which could cost the exhibitor a significant amount of money, with very limited foreseeable benefits. The details are often available on the form itself, but are often too small and insignificant to be noticed. It is always wise to really the small print before signing a contract, and if the information is impossible to read then the contract should not be signed. These publications have no connection with SEMI or any of our events, and it is important that all companies are made aware of this. 

Should you receive any communication from the Expo-Guide and Fairguide.com or related company, please IGNORE THEM COMPLETELY and DO NOT COMMUNICATE WITH THEM IN ANY WAY.

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