FST has developed Raman Spectroscopic Microscope for the large flat panel display industry, for the first time in the world. Model name PEGASUS-85S uses Raman Spectroscopy technology combined with large stage handling and positioning technology so that the tool can directly analyze the particle component and structure on the large size glass without any additional sample treatment for Raman analysis.
Therefore the tool can dramatically reduce the Raman analysis time from previous 7 days to less than an hour and can eliminate the sample’s corruption during sample treatment and movement.
PEGASUS-85S has a high NA 50x objective lens to analyze <1.0um particles and can adjust laser power with 256 steps by ND wheel. A 8.5 generation glass, 2500 mm x 2200 mm, can be loaded on the stage with the positioning accuracy <10um.
When a particle’s spectrum is acquired, user can save the spectrum to the database and use it for spectrum comparison. As a result, with a good-prepared database, user can immediately identify any particle component in the database with PEGASUS-85S.
Laser Scanning Microscope (LSM)
- Defect analysis and high resolution review system
- Material / component structure analysis
- Thin film analysis: uniformity, material characteristic/properties
- Noncontact, nondestructive analysis