Pivotal Systems, the leading provider of best-in-class monitoring and process control technology for the semiconductor manufacturing industry, is presenting the industry’s fastest flow controller, the Pivotal Gas Flow Controllers (GFC) at SEMICON KOREA 2022. The GFC is field proven and shipping in high volumes with response speeds of <100msec, three times faster than competitive mass flow controller technologies available today.
“Having the fastest and most accurate flow controller available today enables the leading plasma etch, atomic layer processing (ALD/ALE) capital equipment companies to meet their technology roadmaps,” said Joseph Monkowski, CTO for Pivotal Systems. “We are seeing advanced processes specifically for ALD and ALE requiring high throughput and high yield, driving the need for higher control speeds. Not only are customers using us for speed, but also for our advanced diagnostics and our automated in-situ NIST traceable flow calibration that eliminates the need for pulling the gas flow controller off for recalibration.”
Pivotal’s full product line of Gas Flow Controllers (GFC) offers both the highest accuracy and real-time monitoring and control of the most critical gas flow parameters in wafer processing today. Leading IDMs, foundries and OEMs use Pivotal’s products to dramatically increase yield and productivity by avoiding catastrophic scrap events, tightening process windows, and matching chambers and eliminating the need for offline flow calibration.
“We see our GFC as yet another game changer because there are no other technologies in the market today that can flow accurately at these high speeds with nanometer control that enables industry leading precision and increases productivity,” said Kevin Hill, COO for Pivotal Systems.