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INFICON

Seongnam-Si,  Gyeonggi-Do 
Korea (South)
http://www.inficon.com
  • Booth: D434


Welcome to INFICON Innovation based on proven technology

INFICON provides world-class instruments for gas analysis, measurement and control. INFICON is a leading developer manufacturer and supplier of vacuum instrumentation, critical sensor technologies and process control software with an emphasis on process engineering expertise, for the semiconductor and related industries. These analysis measurement and control products are vital to original equipment manufactures (OEMs) and end -users in the complex manufacturing of semiconductors.

 Products

  • UL6000 Fab
    The UL6000 Fab by INFICON is not only the most precise, durable and thus reliable testing system on the market, it also saves time throughout the testing sequence....

    • The UL6000 Fab by INFICON is not only the most precise, durable and thus reliable testing system on the market, it also saves time throughout the testing sequence.

    In capital-intensive industries such as the manufacturing of semiconductors, your employees suddenly become the pit crew and must find and repair leaks very quickly. So rely on our newest solution for your leak testing team: The UL6000 Fab by INFICON is not only the most precise, durable and thus reliable testing system on the market, it also saves time throughout the testing sequence. These benefits, along with the intuitive handling and a proven helium spraying method, help your pit crew find even the smallest leaks in record time with the helium spraying method.

  • SENTRAC STRIX
    Simple to use hydrogen leak detection The Sentrac Strix Edition Hydrogen Leak Detector is designed for industrial production and maintenance leak detection applications. ...

    • The Sentrac Strix Edition Hydrogen Leak Detector is designed for industrial production and maintenance leak detection applications. Based on the Sentrac Hydrogen Leak Detector, Sentrac Strix Edition brings the benefits of its predecessor to a higher level thanks to the all-new hand probe and sensor: Strix. The highly sensitive and selective Strix hydrogen sensor ensures quicker reaction and recovery times to find anything from small to large leaks without delay. Long sensor lifetime and its resilience to high background levels of gas minimize the risk for operator errors and for missing small leaks.
     
  • SEMIQCM™ SR SENSORS FOR PRECURSOR MONITORING
    MAKING EXCELLENCE REPEATABLE Protect and Grow Your Profit with Precision Rate and Thickness Monitoring...

    • MAKING EXCELLENCE REPEATABLE

    Protect and Grow Your Profit with Precision Rate and Thickness Monitoring

    The SemiQCM™ SR sensor is one component of a system for precursor monitoring with the other components being an IMM-200 and FabGuard (version 19.12.00-a or higher).

    Semi Process Monitoring can be used in semiconductor applications for end point detection and fault elimination by monitoring the amount of precursor in the foreline or chamber exhaust. The use of an in situ QCM provides affordable process monitoring and improved semiconductor process profitability.

    The failure to deliver precursor to a wafer can be detected in as little as one wafer.

  • QUANTUS® LP100
    Real-time Endpoint Detection and Leak Detection The INFICON Quantus LP100 Gas Analyzer provides real-time leak detection and endpoint detection for your critical process environments....

    • Real-time Endpoint Detection and Leak Detection

    The INFICON Quantus LP100 Gas Analyzer provides real-time leak detection and endpoint detection for your critical process environments. Many processes are sensitive to leaks or require endpoint detection. The Quantus LP100 is a gas analyzer that is designed to react to small changes in sensitive process environments in real-time so that scrap is minimized and yields are improved.
  • XL3000FLEX
    Highest Measurement Certainty and Fastest Throughput HIGH FLOW Technology for Highest Measurement Certainty and Fastest Throughput...

    • Highest Measurement Certainty and Fastest Throughput

    HIGH FLOW Technology for Highest Measurement Certainty and Fastest Throughput

    XL3000flex sniffer leak detector is the first device to detect leaks with forming gas (95% nitrogen and 5% hydrogen) as accurately as with helium, with a smallest detectable leak rate of 1 ∙ 10-7 mbar∙l/s for both test gases.

    The XL3000flex provides the best flexibility to choose the test gas which is easiest to obtain according to lower cost. In addition, the XL3000flex uses the INFICON High Flow Technology: the device operates with a gas flow of 3000 sccm - the highest gas flow available on the market today. This allows the sniffer tip to be moved over the test piece at some distance and at a higher speed, so even the most inexperienced operators can achieve reliable results with the XL3000flex.

    An additional advantage of the high gas flow is that it is the only way to enable reliable robotic sniffer leak testing.   

Categories

203 Equipment, Inspection & Measurement
  • Leak Detection Systems - Vacuum or Gas
    • 400 Components, Parts & Accessories
  • Pipe; Tubing; Hose; Flanges; Connectors; Couplings; Plumbing Fittings
  • Raw Material & Custom components; Metal
  • Sensors
    • 401 Sub-systems
  • Plasma Sources; Controls; Monitoring; Diagnosis


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