L.S TEC CO., LTD.

Yongin-si, Gyeonggi-do, 
Korea (South)
http://www.lstec.co.kr
  • Booth: D912


We are waiting for you at 2020 SEMICON KOREA!

Since our foundation in 2010, we have been striving to become a company that grows with our customers. We have always attempted to achieve customer satisfaction through IT innovation and semiconductor technology based on creative research and continuous product quality improvement.
We will continue to do our best to provide excellent quality and service by proactively
responding to new product development.
Based on our expertise in IT innovation and semiconductor technology, along with our transparent management values, we will establish a strategic partnership with our customers, and improve our technological competitiveness and social values to become a company with soul.
We will do our best to serve you and we ask for your continued interest and encouragement.
Thank you.


 Products

  • LOAD PORT for 300mm Wafer / Dicing Frame Load Port
    300mm FOUP Load Port (Smart SELOP-8 Series)...

  • Extreamly Smooth, FOUP door Open/Close Motion.

    Great improvement of particle performance. 
    Reduction of vibration during door open/close by hybrid of pneumatic and electric driven mechanism.
    Compliance of high sealed FOUP.

    1) N2 purging on Carrier Base : Adapted FOUP Type; ENTEGRIS A-300, Spectra (4 Purge Port Type)  
    2) Purge Clean N2 Gas
    ① Filters, installed just in front of the nozzle, can block particle   entering to FOUP
    ② Adhesion to Grommet of FOUP
    3) Monitor N2 Gas flow rate by flow meter
    4) Control N2 Gas flow rate by MFC
    5) Feild Upgrade   Standard SELOP8 to N2 Purge Load Port is possible

  • SORTER for 300mm Wafer
    Sorter 300mm advanced substrates...

  • The G5+ series, latest generation of COMPACT sorters   RECIF Technologies, is the standard solution for 300mm silicon wafers sorting. Its innovative design offers a seamless integration due to its field proven modules and technologies such as real time filed bus, or direct drive transmission.

    The G5+ offers fast throughput due to the alignment/OCR function embedded on the handling robot. End Effector design features ensure unsurpassed cleanliness, as well as a highly secure wafer handling through our proprietary ACT (Advanced Contact Technology).

    Its industry leading robustness, flexibility and ease of maintainability, coupled with the smallest footprint and highest throughtput in a single robot sorter, provides IC manufacturers the ultimate productivity solution for 7 nm nodes and beyond.

    The G5+ sorter offers:

    Advanced PWP front face performance < 0.0049 @ 26nm*
    End effector: 3 points backside Advanced Contact Technology as standard configuration
    New industrial controller
    ISO Class 1 mini-environment
    SEMI300 standards compliant
    2 or 4 Load Ports configuration
    Integration into stocker (2 or 4 LP)
    Low cost of ownership
    Standard & configurable process programs
    Compatible with all SEMI compliant FOUP/ FOSB types
    Automated hidden time mapping
    New side casing for optional handling features
     
    * Based on 1000 cycles test per wafer - Tool configuration, clean room environment and FOUP/ FOSB type to be defined

  • PLAZMARK Waper Type
    Plasma Indicator for Semiconductor Manufacturing Process...

  • Because it takes a shape similar to that of the substrate in use, this indicator can be set in the equipment and in-plate distribution evaluation can be carried out easily, with no special handling necessary.
    A heightened level of cleanliness is achieved due to the product’s minimization of outgassing rates.

    Targeted Processes;
    Plasma Ashing
    Plasma Etching
    Plasma CVD (carrier gases only)
    Sputtering (reverse sputtering only)

  • Eaglei 300mm
    Eaglei 300mm - Automated Wafer Carrier Inspection Systems...

  • The NEW EAGLEi Series was designed to automatically verify critical wafer carrier dimensions. Fabs use the EAGLEi series to quickly identify out-of-tolerance carriers through in-coming and in-process inspection.  Removing carriers that do not meet specification will improve wafer transfers, maximize equipment availability, and enhance overall yield through a reduction in wafer breakage and particle contamination.
    Automatically verifies critical wafer carrier and FOUP dimensions.
    Provides incoming and in-process inspection
    Compares measurements to carrier manufacturer specifications or your own                 
    Identifies out-of-tolerance wafer carriers                  
    Reduces wafer carrier and FOUP interoperability issues
    Windows® 10 operating system
    Hi Resolution, flat panel screen
    All new components

BEWARE - Special Warning Notice about ExpoGuide and FAIRGuide

With the ongoing solicitations, SEMI would like to continue to alert you with questionable professional practices perpetrated against exhibitors by FairGuide.com (Austria) and Expo Guide (Mexico), Event Fair - The Exhibitors' Guide with their misleading directory services. There may be others that we are not aware of and are hence not named here. 

These companies provide legitimate exhibition guides aimed at exhibitors across the globe offering online listing services. They use a form which resembles and organizer's free catalogue listing service, inviting exhibitors to complete the form for an entry in an on-line directory. Unsuspecting exhibitors who sign and return the form are then contracted into a three-year, non-retractable agreement, which could cost the exhibitor a significant amount of money, with very limited foreseeable benefits. The details are often available on the form itself, but are often too small and insignificant to be noticed. It is always wise to really the small print before signing a contract, and if the information is impossible to read then the contract should not be signed. These publications have no connection with SEMI or any of our events, and it is important that all companies are made aware of this. 

Should you receive any communication from the Expo-Guide and Fairguide.com or related company, please IGNORE THEM COMPLETELY and DO NOT COMMUNICATE WITH THEM IN ANY WAY.

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