The G5+ series, latest generation of COMPACT sorters RECIF Technologies, is the standard solution for 300mm silicon wafers sorting. Its innovative design offers a seamless integration due to its field proven modules and technologies such as real time filed bus, or direct drive transmission.
The G5+ offers fast throughput due to the alignment/OCR function embedded on the handling robot. End Effector design features ensure unsurpassed cleanliness, as well as a highly secure wafer handling through our proprietary ACT (Advanced Contact Technology).
Its industry leading robustness, flexibility and ease of maintainability, coupled with the smallest footprint and highest throughtput in a single robot sorter, provides IC manufacturers the ultimate productivity solution for 7 nm nodes and beyond.
The G5+ sorter offers:
Advanced PWP front face performance < 0.0049 @ 26nm*
End effector: 3 points backside Advanced Contact Technology as standard configuration
New industrial controller
ISO Class 1 mini-environment
SEMI300 standards compliant
2 or 4 Load Ports configuration
Integration into stocker (2 or 4 LP)
Low cost of ownership
Standard & configurable process programs
Compatible with all SEMI compliant FOUP/ FOSB types
Automated hidden time mapping
New side casing for optional handling features
* Based on 1000 cycles test per wafer - Tool configuration, clean room environment and FOUP/ FOSB type to be defined