02-531-7800

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SRT Co., Ltd.

Hwaseong-si,  Gyeonggi-do 
Korea (South)
http://www.e-srt.co.kr
  • Booth: BS47

SRT Co., Ltd. is a superior company in producing vacuum valves used in the semiconductor and display industries with the technological capability to develop and supply the vacuum valve products that are customized.
we provide R&D services for various vacuum valves according to customer's needs through a high level of understanding of relevant industries. 

SRT is developing and supplying vacuum components that are required for Semiconductor manufacturing Equipment such as  CVD, ALD, Etch, and other processes. 

We are very capable of a vacuum valve manufacturing and solution providing company for nanodevice process to meet your needs at any time.

Thank you.

 Products

  • SLIT Valve
    TRUE L MOTION TRANSFER VALVE...

    • Application

    - Isolation for process chamber and load lock.

    - semiconductor manufacturing system

    - Highly reliable for differential pressure and counterpressure

                  

    Features

    - L motion pneumatic actuating

    - Welded Bellows with main shaft

    - Low cost of ownership

    - High durability

              

    Advantage

    - Virtually shock free

    - Robust structure

    - True L Motion

                   

    General Specifications

    Pressure Range

    ATM to 1.0 · 10-7 mbar to 1.2 bar

    Leak Rate

    Seat

    1 x 10-9  mbar. l/s

    Body

    1 x 10-9  mbar. l/s

    Material

    Body

    AL6061,SS304

    Disc

    AL6061

    Operating Temperature

    0℃~120℃

    Seal O-ring

    VITON(Optional FFKM)

    Cycle until first service

    1,000,000

    Open/Close indicating

    Position Sensor
  • GATE Valve
    MANUAL GATE VALVE / AUTO GATE VALVE / PROTECTION GATE VALVE ...

    • Application

    - Isolation for vacuum line and vacuum pump

    - Semiconductor and FPD manufacturing system

    - Various type available : standard, protection, manual

                                     with optional direct heating technology

                             

    Features

    - Protection Gate Valve (Normal/Heating)

    - Manual protection Gate Valve (Normal/Heating)

    - Suited for harsh process

    - Soft pumping function (Auto/Protection type)

                           

    Advantage

    - Rapid Closing (protection type)

    - Avoid contamination (shutter mechanism type)

    - High temp heating(Max 180 ℃)

                            

    General Specifications

    Pressure Range

    ATM to 1.0 · 10-7 mbar to 1.2 bar

    Leak Rate

    Seat

    1 x 10-9  mbar. l/s

    Body

    1 x 10-9  mbar. l/s

    Material

    Body

    AL6061,SS304

    Disc

    AL6061

    Operating Temperature

    0℃~120℃

    Seal O-ring

    VITON(Optional FFKM)

    Cycle until first service

    DN50 ~ DN100 : 50,000

    DN100~ DN200: 10,000

    Open/Close indicating

    manual / Position Sensor

    Close/Open time

    1.0~2.0 sec (normal type)

    0.3~0.6 sec (Protection type)
  • ANGLE Valve
    MANUAL ANGLE VAVLE / PNEUMATIC ANGLE VAVLE / TWO-STAGE ANGLE VALVE ...

    • Application

    - Isolation for vacuum line and vacuum pump

    - Semiconductor and FPD manufacturing system

    - Various type available : manual, pneumatic, two stage

                                     with optional direct heating technology

                          

    Features

    - Locking mechanism(manual type)

    - feedthrough(bellows, shaft)

    - Soft pumping option available(pneumatic type)

                                   

    Advantage

    - Long lifecycle and low cost

    - Suited for harsh process(with Heating type)

    - High temp heating(Max 180 ℃)

                           

    General Specifications

    Pressure Range

    ATM to 1.0 · 10-7 mbar to 1.2 bar

    Leak Rate

    Seat

    1 x 10-9  mbar. l/s

    Body

    1 x 10-9  mbar. l/s

    Material

    Body

    AL6061,SS304

    Disc

    AL6061

    Operating Temperature

    0℃~120℃ (heating type : ~180℃

    Seal O-ring

    VITON(Optional FFKM)

    Cycle until first service

    Manual :        50,000

    PNEUMATIC: 1,000,000

    Open/Close indicating

    Manual / Position Sensor
  • RPS Valve(Angle)
    Remote Plasma System Angle Valve ...

    • Application

    - Isolation for remote plasma system

    - Semiconductor manufacturing system

    - Available type : standard, particle free

                          

    Features

    - Flow guide structure

    - Avoid particle contamination mechanism

    - Suited for Remote Plasma Cleaning process

                        

    Advantage

    - Extremely long life cycle

    - Low cost of ownership

    - Compact and light weight

    - Easy to maintenance

                         

    General Specifications

    Pressure Range

    ATM to 1.0 · 10-7 mbar to 1.2 bar

    Leak Rate

    Seat

    1 x 10-8  mbar. l/s

    Body

    1 x 10-8  mbar. l/s

    Material

    Body

    AL6061

    Disc

    AL6061

    Operating Temperature

    0℃~150℃

    Seal O-ring

    FFKM

    Cycle until first service

    1,000,000

    Open/Close indicating

    Position Sensor
  • RPS Valve(Gate)
    Remote Plasma System Gate Valve ...

    • Application

    - Isolation for remote plasma system

    - Semiconductor manufacturing system

    - Available type : standard, protection type with cooling technology

                         

    Features

    - Flow guide structure

    - Avoid particle contamination mechanism

    - Suited for Remote Plasma Cleaning process

    - Straight path for gas flow

                       

    Advantage

    - Extremely long life cycle

    - Suited for high temp cleaning process

    - Easy to maintenance

                       

    General Specifications

    Pressure Range

    ATM to 1.0 · 10-8 mbar to 1.5 bar

    Leak Rate

    Seat

    1 x 10-8  mbar. l/s

    Body

    1 x 10-8  mbar. l/s

    Material

    Body

    AL6061

    Disc

    AL6061

    Operating Temperature

    0℃~250℃

    Seal O-ring

    FFKM

    Cycle until first service

    500,000

    Open/Close indicating

    Position Sensor
  • APC Valve
    AUTO DAMPER VALVE ...

    • Application

    - Downstream pressure control valve for vacuum process

    - Semiconductor and FPD manufacturing system

    - DeviceNet communication available

                          

    Features

    - Compact design

    - Short control response times

    - Integrated controller

                         

    Advantage

    - low cost of ownership

    - easy to maintenance

                         

    General Specifications

    Pressure Range

    ATM to 1.0 · 10-5 mbar to 1.2 bar

    Leak Rate

    Seat

    1 x 10-7  mbar. l/s

    Body

    1 x 10-7  mbar. l/s

    Material

    Body

    AL6061,SS304

    Disc

    AL6061

    Operating Temperature

    0℃~120℃

    Seal O-ring

    VITON(Optional FFKM)

    Cycle until first service

    1,000,000 Trottling

    Open/Close indicating

    Position Sensor

Categories

400 Components, Parts & Accessories
  • Flow Control Components - Valves; Meters; Gauges; Regulators; MFC's
    • 401 Sub-systems
  • Cameras - Still; CCD; Video & Monitors
  • Process Monitoring systems


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