LOT Vacuum Co., Ltd.

Anseong-si,  Gyeonggi-do 
Korea (South)
  • Booth: A618

LOT VACUUM is the only Korean company making Dry Vacuum Pump

LOT Vacuum, the company for developing, manufacturing, and marketing Vacuum Pump for processing semiconductors and LCD markets, began its business with undertaking DryVacuum pump business part Leybold in Germany. DuraDry™ Series, the original product name of LOT Vacuum, adopted innovative Split-Flow Screw Design, so that it can correspond to all processes of semiconductor and LCD based on improved performance and credibility. DuraDry™ Series has been approved by customers for its outstanding ability to handle Heavy Duty Application which produces massive amount of process by-products. Furthermore, to answer the needs of lower power consumption in various of industries, LOT VACUUM developed HD series for process, RD series for loadlock, and VD series for general industries.

 Press Releases

  • 반도체, 디스플레이용 건식진공펌프 장비 전문업체 엘오티베큠이 글로벌 진공산업 솔루션 공급자로 도약하겠다는 목표를 세웠다. 국내 외 해외 고객사 비중을 늘리고 반도체와 디스플레이가 아닌 일반 산업 분야로 펌프 판매를 확대한다.

    엘오티베큠 매출 대부분은 반도체용 펌프 장비에서 나온다. 디스플레이 분야에서도 장비 공급을 늘려가고 있다. 그러나 2차전지, 화학, 제약 등 일반 산업 분야는 아직 미개척 상태다. 반도체와 디스플레이 분야에서 성장세를 이어가면서 일반 산업 분야로 사업 영역을 확장, 매출을 확대하겠다는 것이 엘오티베큠의 중장기 성장 계획이다. 중국 등으로 고객사를 다각화하는 노력도 계속할 계획이다.

    통합배기시스템(TES:Total Exhaust System) 사업도 확대한다. TES는 챔버와 펌프 사이 배관에 위치해 플라즈마로 공정 가스 및 부산물을 효과적으로 처리하는 PPS(Plasma Pre_treatment System), 펌프 배기부에 장착돼 배기가스를 처리하는 APS(After Treatment Plasma System), 그 외 진단시스템과 제어시스템 등을 통칭하는 단어다. 이미 일부 개별 제품군은 고객사로 공급돼 양산 라인에 적용됐다.

    조창완 엘오티베큠 사업기획팀 이사는 “경쟁력 있는 건식진공펌프 장비와 TES를 섞어 진공장비 분야 글로벌 솔루션 공급자로 도약하는 것이 목표”라고 설명했다.

    엘오티베큠은 국내 유일 검식진공펌프 장비 업체다. 반도체와 디스플레이 전공정 과정 대부분은 진공 상태에서 이뤄진다. 진공 펌프는 장비 챔버 내에 있는 기체를 포함한 각종 물질을 빨아들여 진공 상태를 만든다. 300mm 웨이퍼 투입기준 월 14만~15만장 생산 용량을 갖춘 반도체 공장에는 6000대 안팎의 진공펌프가 설치된다.

    엘오티베큠은 동일 형태의 나사 한 쌍이 맞물려 회전하면서 물질을 흡입, 배기하는 스크류 방식 진공펌프 기술을 보유했다. 엘오티베큠 진공장비는 배기량이 높고 소음과 전력 소모량, 크기가 작아 다수의 글로벌 반도체 디스플레이 기업으로부터 좋은 평가를 받고 있다.

    출처 : 전자부품 전문 미디어 디일렉(http://www.thelec.kr)


  • DuraDry Series
    DuraDry Series are well known for heavy duty process pump....

  • DuraDry, DD series are well known for handling massive by-product during the semiconductor manufacturing process. Since its inception of dual slipit screw design, DuraDry series are positioning at top tier for handling by-product   the most harsh processes in semiconductor industries. The pumping capacity varies   2,000 LPM to 100,000 LPM.
  • HD Series
    HD Series are great at handling by-product process with low-power consumption....

  • To answer the needs for low power consumption of process pump, LOT VACUUM developed HD Series. Since its product launching, HD series have been rapidly expanding its product install base to various customers with great performance. Pumping capacity varies   2,000 LPM to 150,000 LPM.
  • RD Series
    RD Series are for large-volume loadlock process....

  • RD Series are LOT VACUUMs answer to the needs of larger pumping capacity pumps especially for the loadlock process. As wafers and display panels becoming larger, the needs of larger pumping capacity loadlock pumps becomes necessary. RD Series pumping capacity vary 2,000 LPM to 58,000 LPM.

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