Sealink Corp. succeeded in replacing the magnetic seal of the R-axis unit for semiconductor deposition furnace equipment with the innovative technology of sealing. The magnetic seal is used in semiconductor processing equipment, and the technology of Sealink Corp. can replace this. This innovative technology has a long lifespan and a simple structure, which gives economic benefits. With such technology, it can be applied to CVD, MOCVD, LPCVD, PECVD, PCD, ALD, CMP, OLED, LCD device, FPD device, Wafer handling device, Vacuum deposition system, Ion Implanter, Etcher, Asher, Edge Grinder, Scrubber, RTP, Sputter, Lamp device, Autoclave, Wafer robot, etc.
Sealink Corp. succeeded in replacing Welded Metal Bellows by using innovative technologies.