The cassette handling system uses a tilt mechanism to realize smooth cassette conveying without wafer displacement.
Robot for Semiconductor with batch end-effector for 5 pieces of wafer High-speed handling of cassette with different pitches for such as vertical furnace. Execution of origin search is not required by using the servo motors with absolute encoders. Suitable for the system with low-passline and long vertical stroke. Highly flexible layout is provided with rotation angle of ±160 deg. by column-type driving unit. Pitch shifting of end-effector can be freely set in the range of 5mm to 10mm.