Power generator for plasma
Microchips, flat screens, and solar cells are all manufactured using innovative plasma technology. Many high-tech products which require thin layers in the nanometer range can only be created with targeted deposition and removal of material. However, plasma technology requires plasma. The generators TRUMPF Huttinger can offer a wide power and frequency spectrum, and ensure that the plasma ignites reliably and is stable when it burns.
RF/MF/DC Plasma Excitation
TruPlasma RF/MF/DC generators TRUMPF Huttinger provide the highest process stability of all power supplies for plasma excitation. TruPlasma RF/MF/DC generators technology is therefore especially suited to processes which need the highest level of precision and reproducibility. Also in terms of energy efficiency and robustness, our TruPlasma RF/MF/DC generators are amongst the leaders on the market ? they are therefore the first choice for demanding applications such as the manufacture of semi-conductor elements, microchips, solar cells or flat screens.