VAT Korea Ltd.

Pyeongtaek-city,  Gyeonggi-do 
Korea (South)
http://www.vatvalve.com
  • Booth: C322

Best partner of the semiconductor, display and solar industry.

VAT is the leading global developer, manufacturer and supplier of high-performance high-end vacuum valves, multi-valve modules, edge-welded bellows and related value-added services. The Group, headquartered in Haag, Switzerland, employs approximately 1,200 people worldwide. VAT has a global manufacturing footprint with production facilities in Haag, Switzerland, Penang, Malaysia, and Arad, Romania, as well as a facility in Xinwu, Taiwan, serving local customers.

VAT’s products and services are mainly used in semiconductor, display and solar panel manufacturing as well as in a wide range of industry and research applications. The business offering is structured into the three segments Valves, Global Services and Industry.

VAT’s customer-facing activities are organized into four regions, the Americas, EMEA, Asia and ROW. Each region has sales, services and engineering support to ensure customers receive the highest level professional advice, quotations and service.


 Products

  • Control Valve
    Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast ....

  • Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast .
  • Transfervalves
    The key features of the TwinVAT technology are the lightweight design, fast opening and closing movement, low particle generation, easy and fast maintenance, low cost of ownership and the modular design, which enables easy upscaling....

  • The key features of the TwinVAT technology are the lightweight design, fast opening and closing movement, low particle generation, easy and fast maintenance, low cost of ownership and the modular design, which enables easy upscaling. Unique with this valve design is the special service position, under which one chamber is maintained under vacuum during gate service. By a wide range of options such as gate grounding, various sealing compound materials for gate etc. (see table options) the product can be flexible adjusted to specific requirements for various display manufacturing processes.
  • Pendulum valves
    For demanding semiconductor processes such as CVD and ETCH....

  • For demanding semiconductor processes such as CVD and ETCH.

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