COMA Technology

Gumi-si, Gyeonsangbuk-do, 
Korea (South)
http://www.comatechnology.com
  • Booth: B637

COMA Technology is specialized in manufacturing of semiconductor parts.

COMA Technology Co., Ltd., since its inception in January 2013 starting with manufacture and lapping/polishing of parts of sapphire and ceramic, has grown up to be a specialized company in parts and materials of various high functional sapphire and ceramic for semiconductor, display, defense and medical industry machines, etc. 

Especially in manufacture of industrial sapphire parts COMA has the top level of machining, lapping, polishing and surface finish technology in Korea and through incessant R&D investment it continues to newly bring out such matchless unique technologies as bonding, micro machining, etc

 Products

  • Silicon Parts
    ....

    • A professionalised enterprise in manufacturing of Si finished products including Focus ring, Shield ring , Electrode etc along with production of Si parts required for dry etcher process with a well equipped in house facilities for all stages.
  • Sapphire Nozzle
    ....

    • If the current parts made of Ceramics, Quartz, Silicon, etc. for semiconductor processes are replaced to sapphire parts, they will minimize the pollution sources and particles generated in the CVD & Etching process chambers and maximize the yield rate. Sapphire is applied in the extreme circumstances like where NF3 and CF4 are used, minimizing particles and making incessant work environment with long lifetime.
  • Sapphire Window
    ....

    • Sapphire Window, with its strong chemical resistance, high strength and high penetrability, is used for not only the semiconductor process chambers but also many other high-degree vacuum applications.
  • Porous Vaccum Chuck
    ....

    • Porous ceramic is a ceramic of which the material itself has numerous pores by the ceramic sintering technology and is used for a vacuum chuck. Recently it is widely used as a basic material for various industrial products like filters, refractories, kiln furnitures, absorbers, acoustic absorbents, light weight structural materials, adiabatic materials, etc.

Categories

400 Components, Parts & Accessories
  • Chucks for Wafer and other Substrates
  • Windows
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