02-531-7800

KYUNGWON TECH CO., LTD.

Seongnam-si,  Gyeonggi-do 
Korea (South)
http://www.kw-tech.co.kr
  • Booth: A104


Etching/Deposition Profile and Plasma Simulator Provider

Since Kyungwon Tech was established in 1998, we has been providing comprehensive consulting services in the field of computational fluid analysis and plasma processing. We have developed our engineering software K-SPEED (3D feature profile simulator for plasma process) and FanDAS (simulator for design optimal fan shape). We are also providing consulting services as a domestic distributor of SimericsMP, Barracuda, CAESES, CFturbo and VizGlow.

Kyungwon Tech has worked for numerical simulation of plasma processing of microelectronics industry and commercialized 3D etching profile simulator in 2013, K-SPEED, focusing on deep etching of semiconductor process. Due to the unique plasma reaction data of C4F6, C4F8, and other gases, it has given insight of semiconductor etching process and made a good success, which was not available in the past. It can be applicable to other etching and CVD processes in the future.


 Press Releases


 Products

  • K-SPEED
    K-SPEED is a simulator for plasma etching profile to predict etching profiles and accompanied phenomena such as bowing, necking, etch stop, polymer passivation via effective computation taking into account various physical and chemical effects...

  • K-SPEED is a simulator for plasma etching profile to predict etching profiles and accompanied phenomena such as bowing, necking, etch stop, polymer passivation via effective computation taking into account various physical and chemical effects essentially which affect on dry etching process.
  • VizGlow
    LOW-TEMPERATURE PLASMA MODELING SOFTWARE...

  • VizGlow provides capability for multi-species, multi-temperature, self-consistent or quasineutral, finite-rate gas-phase and surface chemistry description of plasma discharges. Plasma discharges driven by direct-current, capacitive coupling, inductive heating, and wave heating can all be analyzed with VizGlow. Plasma discharge sizes ranging   small micron-scale microdischarges to large meter-scale industrial processing systems can be studied. Moreover, discharges ranging in pressures   a few mTorr (low pressure inductively coupled discharges) to tens of atm’s (automotive ignition systems), and powers ranging   a few Watts (lighting discharges) to tens of kilowatts (large-scale materials processing) have all been simulated robustly and accurately with VizGlow.

BEWARE - Special Warning Notice about ExpoGuide and FAIRGuide

With the ongoing solicitations, SEMI would like to continue to alert you with questionable professional practices perpetrated against exhibitors by FairGuide.com (Austria) and Expo Guide (Mexico), Event Fair - The Exhibitors' Guide with their misleading directory services. There may be others that we are not aware of and are hence not named here. 

These companies provide legitimate exhibition guides aimed at exhibitors across the globe offering online listing services. They use a form which resembles and organizer's free catalogue listing service, inviting exhibitors to complete the form for an entry in an on-line directory. Unsuspecting exhibitors who sign and return the form are then contracted into a three-year, non-retractable agreement, which could cost the exhibitor a significant amount of money, with very limited foreseeable benefits. The details are often available on the form itself, but are often too small and insignificant to be noticed. It is always wise to really the small print before signing a contract, and if the information is impossible to read then the contract should not be signed. These publications have no connection with SEMI or any of our events, and it is important that all companies are made aware of this. 

Should you receive any communication from the Expo-Guide and Fairguide.com or related company, please IGNORE THEM COMPLETELY and DO NOT COMMUNICATE WITH THEM IN ANY WAY.

For Technical Support with this webpage, please contact support.