Axcelis Technologies

Beverly,  MA 
United States
http://www.axcelis.com
  • Booth: D704


Enabling Intelligent Connectivity

Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process.


 Press Releases

  • Axcelis’ Leadership in the Power Device Segment Continues to Expand

    BEVERLY, Mass., Jan. 6, 2021-- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, today announced follow on shipments in the third and fourth quarters of the Company’s Purion H200 SiC Power Series™ high current implanters to a leading power device chipmaker. The shipments went to multiple fabs located in Asia and Europe.  In the fourth quarter Axcelis also successfully closed a Purion XE Power Series SiC high energy implanter evaluation for a new customer penetration in Europe. The systems at both customers will be used in high volume production of SiC power devices supporting automotive device markets.

    Executive Vice President of Product Development, Bill Bintz, commented, “Increasing automotive power device content is fueling particularly high growth in the power market.  Currently, the

    SiC Power Device market is forecast to grow with a CAGR of 30% from 2019 to 2025. Device fabrication in this segment requires high implant capital intensity for processes that require higher energy implants and higher energy high dose implants. The Purion product portfolio is uniquely positioned to cover all current and emerging implant applications for this market segment. We look forward to continuing to support our customers’ goals to improve power device performance and expand manufacturing capacity.”

    About Axcelis:

    Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for 40 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

  • BEVERLY, Mass., Dec. 6, 2021 -- Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today the successful completion of a Purion H™ high current tool evaluation at a leading advanced logic device manufacturer. The system will support high volume production of logic devices.

    Executive Vice President, Product Development, Bill Bintz, commented, “We’re very excited about the potential of this win, as we see significant opportunities for production buys in 2022 and 2023.  

    The Purion H has an innovative high current implanter architecture, featuring unique scanned spot beam technology, designed for advanced memory and logic applications. The Purion H offers exceptional versatility, throughput and uniformity, enabling chip manufacturers to achieve greater yield with the lowest cost of ownership.”

    About Axcelis:

    Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing innovative, high-productivity solutions for the semiconductor industry for over 40 years. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process. Learn more about Axcelis at www.axcelis.com.

    Safe Harbor Statement
    This press release contains forward-looking statements under the Private Securities Litigation Reform Act safe harbor provisions. These statements, which include our expectations for spending in our industry and guidance for future financial performance, are based on management’s current expectations and should be viewed with caution. They are subject to various risks and uncertainties that could cause actual results to differ materially from those in the forward-looking statements, many of which are outside the control of the Company, including that customer decisions to place orders or our product shipments may not occur when we expect, that orders may not be converted to revenue in any particular quarter, or at all, whether demand will continue for the semiconductor equipment we produce or, if not, whether we can successfully meet changing market requirements, and whether we will be able to maintain continuity of business relationships with and purchases by major customers. Increased competitive pressure on sales and pricing, increases in material and other production costs that cannot be recouped in product pricing and instability caused by changing global economic, political or financial conditions could also cause actual results to differ materially from those in our forward-looking statements. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other documents filed from time to time with the Securities and Exchange Commission.
     

 Products

  • Purion M Series
    Medium Current Ion Implanter...

  • Purion M ion implanters offer the broadest spectrum of mid-current doses available, offering unparalleled flexibility to meet today’s evolving implant requirements. With high energy capability far beyond competitive implanters, the Purion M is ideal for fabs at higher elevations or those dealing with heavy air mass species. Yet it’s 20% more energy efficient than competing platforms, contributing the industry’s lowest cost of ownership.
  • Purion XE Series
    High Energy Ion Implanter...

  • Our Purion XE series of ion implanters have rapidly earned a reputation as the industry standard for today’s demanding high energy recipes. Their unique RF Linear Accelerator (LINAC) technology offers higher reliability, a wider energy range and greater reliability than competing platforms, with superior metals contamination control.
  • Purion H Series
    High Current Ion Implanter...

  • Purion H ion implanters bring the industry-leading process control of our medium current platforms to the full range of demanding, high-current applications. The flexibility of the platform enables us to tailor Purion H to the specific energy or dosing requirements of your application. The Purion H offers unmatched versatility, throughput and uniformity, so you can achieve greater yield with the lowest cost of ownership.

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