Icheon-si,  Gyeonggi-do 
Korea (South)
  • Booth: DS10

Be welcome and visit at out booth DS10.

Busch Vacuum Pumps and Systems is one of the largest manufacturers of vacuum pumps, blowers and compressors in the world. Our product range comprises the largest  ion of solutions for vacuum and overpressure technology in all industry sectors worldwide.

Our company was founded in 1963. With over 60 companies in more than 40 countries and agencies worldwide, we can provide sound advice and practical support to our customers wherever they are.

All our products are available with a variety of options and advanced design features to match a diverse range of applications, so our  customers benefit   the most appropriate and cost-effective solutions. We constantly evaluate our activities in order to maintain the highest standards, and continue to develop innovative technologies that will define the future of vacuum system applications.


  • Dry Pump-COBRA series
    COBRA Semicon Dry Screw Vacuum Pumps Ultimate pressure: 0.001 - 0.03 hPa (mbar) Pumping speed 60 Hz: 85 - 7385 m³/h...

  • COBRA DS dry screw vacuum pumps offer state-of-the-art harsh duty process and high capacity load lock solutions for the most demanding solar, flat panel, semiconductor or coating applications. These vacuum pumps have best-in-class pumping speed combined with superior hydrogen throughput and excellent powder handling capabilities resulting   their unique screw pump design.

    Equipped with high-efficiency motors and state-of-the-art idle mode capabilities, the COBRA DS series offers excellent energy savings potential.

    Easy to service
    The compact design, with its separate booster and screw pump frames, allows for easy installation and maintenance.

    Optimal cost of ownership
    Due to their optimized space-saving design and energy savings potential, overall cost-of-ownership for these COBRA DS series vacuum pumps is low.

BEWARE - Special Warning Notice about ExpoGuide and FAIRGuide

With the ongoing solicitations, SEMI would like to continue to alert you with questionable professional practices perpetrated against exhibitors by FairGuide.com (Austria) and Expo Guide (Mexico), Event Fair - The Exhibitors' Guide with their misleading directory services. There may be others that we are not aware of and are hence not named here. 

These companies provide legitimate exhibition guides aimed at exhibitors across the globe offering online listing services. They use a form which resembles and organizer's free catalogue listing service, inviting exhibitors to complete the form for an entry in an on-line directory. Unsuspecting exhibitors who sign and return the form are then contracted into a three-year, non-retractable agreement, which could cost the exhibitor a significant amount of money, with very limited foreseeable benefits. The details are often available on the form itself, but are often too small and insignificant to be noticed. It is always wise to really the small print before signing a contract, and if the information is impossible to read then the contract should not be signed. These publications have no connection with SEMI or any of our events, and it is important that all companies are made aware of this. 

Should you receive any communication from the Expo-Guide and Fairguide.com or related company, please IGNORE THEM COMPLETELY and DO NOT COMMUNICATE WITH THEM IN ANY WAY.

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