SmarAct GmbH

Oldenburg,
Germany
http://www.smaract.com/

Booth: A433

SmarAct in cooperation with SEUM Tronics likes to welcome.

SmarAct develops high-performance solutions for handling and positioning in the micro- and nanometer range. The broad product portfolio – from single positioners to complex parallel kinematics, miniaturized robots, and easy-to-use control systems – is completed by sophisticated measuring equipment based on powerful laser interferometers.

SmarAct is located in Oldenburg (Germany) and was founded in 2005 as a spin-off from the University of Oldenburg. In the last 15 years, we have grown to a company with almost 180 employees who cover the complete production process to ensure a high level of product quality including development, construction, mechanical production, electronic production and assembly. We serve high accuracy positioning and metrology applications in research and industry within such fields as optics, life sciences, micro-assembly, semiconductors, and microscopy.

Maintaining the complete production in-house allows a high level of customization so that we can always provide you with the optimal individual or OEM solution.

Press Releases

Cryogenic Positioning Stages with Unrivaled Closed-Loop Positioning Performance (20220111)

For cryogenic applications where highest precision and thermal stability are essential for successful operation, SmarAct has developed cryogenic positioning stages featuring unmatched closed-loop positioning performance with resolutions well below 1 nm. This makes SmarAct's Closed-Loop Cryogenic Stages ideally suited, for example, in the field of fundamental research including 2D materials science or for cryogenic applications such as low-temperature quantum technologies. The high-performance stages are specifically designed to meet the most demanding requirements that world-changing technologies like quantum computing induce. Materials are selected to match the required thermal properties and prevent mechanical stress during cooling and heating cycles. This ensures long lifetime under cryogenic and ultra-high vacuum conditions. Fully non-magnetic versions are available for use in high magnetic fields.

SmarAct’s positioning stages are known for their durability in various and even extreme environments. For the closed-loop cryogenic variants, SmarAct combines its stick-slip piezo drive stages with its high-performance PicoScale sensor heads, which are based on an all-optical Michelson interferometric design. SmarAct’s Closed-Loop Cryogenic Stages are available with travel ranges from 16 to 49 mm. To fulfill customers' individual requirements, completely customized setups are also possible.

Products

SMARPROBE

Nano-Precision Electrical Probing... More Info Less Info

The SMARPROBE system is used to probe even the smallest technology nodes due to the high precision of the SmarAct drives and the active temperature control, which enables low thermal drift of the probes. The closed-loop positioning allows the user to position the tips to the point of interest in a very short time and with as little electron beam exposure as possible. The high motion precision and large vibration-free scan area reduce the risk of damage to the tips and sample during fine positioning. The resulting longevity of the tips, combined with the ability to load several samples, give you the opportunity to significantly improve sample throughput. The SMARPROBE system can be upgraded with a current amplifier implemented directly into the probe holder. It is possible to switch between nanoprobing and current amplification with just one click. The short local distance between probe and amplifier guarantees the lowest measurement noise and high measurement bandwidths. The current amplification is typically used for failure analysis techniques such as Electron Beam Absorbed Current (EBAC) or Resistive Contrast Imaging (RCI), to locate disconnects or shorts within metal lines or VIAs.

SLC-2430-F - Closed-Loop Cryogenic Stage

Sub nanometer resolution closed-loop stage for cryo environments... More Info Less Info

For cryogenic applications where highest precision and thermal stability are essential for successful operation, SmarAct has developed cryogenic positioning stages featuring unmatched closed-loop positioning performance with resolutions below 0.5 nm and unidirectional repeatabilities of 5 nm over a 1 mm travel range. This makes SmarAct's closed-loop cryogenic stages ideally suited, for example, in the field of fundamental research including 2D materials science or for cryogenic applications such as low-temperature quantum technologies. The high-performance stages are specifically designed to meet the most demanding requirements that world-changing technologies like quantum computing induce. The materials for SmarAct's closed-loop cryogenic positioning stages are selected to match the required thermal properties and prevent mechanical stress during cooling and heating cycles. This ensures long lifetime under cryogenic and ultra-high vacuum conditions. Fully non-magnetic versions are available for use in high magnetic fields.

For the closed-loop cryogenic actuators, SmarAct combines its stick-slip piezo drive stages with its high-performance PICOSCALE sensor heads, which are based on an all-optical Michelson interferometric design. SmarAct's closed-loop cryogenic stages are 28 mm in width and 14 mm in hight. They are available in lengths from 30 mm to 75 mm with travel ranges from 16 mm to 49 mm. To fulfill customers' individual requirements, completely customized setups are also possible.

TRIPOD 52-6DoF

Compact and modular multidimensional positioning system with nanometer resolution.... More Info Less Info

The TRIPOD product series consists of compact and modular multidimensional positioning systems that combine serial and parallel kinematics in a hybrid design. Compared to classic hexapods, which are limited in rotation around their Z-axis, SmarAct's TRIPODs offer continuous rotation and high stiffness over the entire working range.

Classic hexapods that should be able to rotate continuously around its Z-axis would have to be equipped with a rotation stage on its top plate which would influence system complexity and the overall cost of such a system. The TRIPOD on the other hand includes such rotation capabilities without mechanical and economical drawbacks.

The central component of a TRIPOD positioning system is the 3D TRIPOD Core, a tip-tilt stage offering two rotational and one translational degree of freedom in a very compact design. Because the TRIPOD is fully compatible to the SmarAct Modular System it can be mounted on top of a high precision XY platform made of CLS linear piezo stages.
The top plate offers mounting space for an additional rotation stage, thus creating a modular positioning system with six degrees of freedom whereas the rotation around the Z-axis is continuous by design.

PICOSCALE

High precision Michelson interferometer for displacement measurements with picometer resolution... More Info Less Info

The PICOSCALE Interferometer is a powerful system for contact-free displacement measurements. The PICOSCALE Interferometer Controller contains a laser source and all necessary electronics to evaluate optical signals. These signals are generated in the sensor heads which are connected to the Controller via optical fibers. A beam splitter divides the laser beam into a reference and a measurement beam which are reflected off a reference mirror (typically inside the sensor head) and a target, respectively. Thanks to the Michelson principle, only very few considerations have to be made with respect to target reflectivity. Powerful firmware modules, convenient software and versatile accessories allow to easily integrate the PICOSCALE Interferometer Controller into new or already existing measurement setups.

Categories

203 Equipment, Inspection & Measurement

Microscopes: Confocal Scanning Microscope; 3-D Video Microscopes

Microscopes: Scanning Electron Microscope (SEM); Focused Ion Beam (FIB), Transmission Electron Micr

205 Equipment, Nanotechnology

Equipment, Nanotechnology Tools

208 Equipment, Test

Failure Analysis Systems

Probing Equipment incl. Analytical; Circuit; Manual; E-Beam; Optical; Wafer Probers

400 Components, Parts & Accessories

Piezo Electronic Components

401 Sub-systems

Motion control systems; Servo control systems & Components

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