EQ GLOBAL RF Generator is provided according to the conditions of each process such as various power and frequency, and the highest efficiency RF Generator is provided to customers through various functions.
•POWER: 600W / 1.5kW / 3kW / 5kW / 10kW
•RF: 100kHz / 380kHz / 750kHz / 2MHz / 3.2MHz / 4MHz / 13.56MHz
•Output Impedance: 50Ω
•Features: Arc Management, Frequency Synchro, User Interface for Easy Operation, RS-232, RS-485, Analog Interface
•RF stability: ±1%
•Cooling system: Air / Water
•Dimensions: 19 inch Rack / Half Rack