STREAM fucntion of the QV Series synchronizes main unit operation with the strobe of the camera used for
measuring and thus enables high-speed measurement to enhance the productivity of semiconductor manufacturing.
For example, the stage keeps moving without stopping while the system measures many pores on the showerhead to check for dimensional erros or foreign substances, which can significantly reduce the takt time.
- Measuring ragne: vision 600×650×250 mm / displacement sensor 476×650×250 mm
- Resolution of scale: 0.1 μm
- Vision measuring accuracy(E1X, E1Y): (1.5+3L/1000) μm
- Displacement sensor measuring accuracy(E1Z): (1.5+4L/1000) μm