Yongin-si, Gyeonggi-do, 
Korea (South)
  • Booth: B116

Thank you for visiting our website and your interest in our products and services.

Our vision is to be world leading company in optical measuring sensor solution.


  • Self-Plasma OES
    소형 Plasma Module을 내장하여 반도체/디스플레이 제조 설비의 배기 라인으로 배출되는 Gas를 분석함으로써 공정 변화 상태를 모니터링하는 센서...

  • 특장점

    √ 국내 시장 점유율 1위 !
    √ 풍부한 해외 납입 실적 (미국,일본,중국 4,000여대)
    √ 내구성 향상을 위한 다양한 기술 보유
    √ 안정적인 시스템 구조 및 데이터 처리 방식
    √ 다양한 공정 적용 경험 및 노하우

    Customer Benefits
    √ Technical expertise, all products developed our own technology
    √ Continuous upgrade in the application in response to customer feedback
    √ H/W, S/W customization options available to fit customer needs 

       1. Application 
         - PVD, (PE)CVD, (PE)ALD, Etcher,  all TM @semiconductor/display manufacturing 
        - Ti TM/PM, W PM, WN TM/PM/Ex, TSN TM, C&C(Si etch) TM, OxALD PM, Diffusion PM 
         - In-situ leak detection 
        - ALD Source monitoring 
        - Dry cleaning endpoint optimization 
        - Process fault detection 
        - In-situ fault detection caused by any chamber condition’s changes 
        - Necessary in-situ gas monitoring to prevent unexpected process accident  
       2. Features 
        - RF plasma ignition : 0mT~10Torr
        - In-situ monitoring for 200~850nm
        - Use highly sensitive CCD sensor(2,048pixels)
        - Advanced EPD algorithms : Fine leak detection algorithm, Life time management 

    반도체/디스플레이 제조 공정 챔버 내부의 Plasma를 분광 분석법으로 분석하여 공정의 종료점을 자동 검출하거나 공정의 변화 상태를 모니터링하는 센서...

  • This is our EPD(End Point Detection)/OES(Optical Emission Spectroscopy) solution designed for detecting endpoint and monitor process state change in the semiconductor and display manufacturing using plasma spectroscopy technology.


    √ 낮은 가격 !  최고의 성능 !
    √ 고객 요구 사항에 따른 최적의 모델 제안 및 신속한 커스터마이징
    √ 안정적인 시스템 구조 및 데이터 처리 방식
    √ 다양한 공정 적용 경험 및 노하우

    Customer Benefits

    √ Control the process accurately and stably
    √ Improve production yield-rate
    √ Respose to the changes of process promptly
    √ Available optimized solution for H/W or S/W to detect an endpoint 


    √ End Point Detection, Process fault Detection
    √ Dry etcher/Asher/PECVD @Semiconductor/display manufacturing
    √ Increase throughput by determining the optimal etch time
    √ Detect process endpoint through in-situ monitoring optical change in the plasma chamber


    √ In-situ monitoring for 200~850nm
    √ Use highly sensitive CCD sensor(2,048pixels)
    √ Advanced EPD algorithms : Differential threshold method, Window method

  • 챔버 플라즈마 모니터
    Pulsed Plasma를 사용하는 Etching, Deposition 등의 공정에서 실제 Pulse 파형이 정확히 유지되고 있는가를 실시간 Monitoring 하는 광학 센서...

  • 특장점 
    √ Time Resolution : 1 micro second !
    √ 1~20kHz 범위의 Pulsed Plasma Repetition Rate 측정
    √ 챔버 외부 Viewport에서 측정하므로 공정에 영향을 끼치지 않는 안전한 방식
    √ 간편한 설치. 도입 및 유지비용 저렴  

    Customer Benefits 

    √ Improve production yield-rate
    √ Separate sensing, not affect the process
    √ Optimized solution for HW/SW to detect plasma fault
    √ Easy and simple to build in low cost 

BEWARE - Special Warning Notice about ExpoGuide and FAIRGuide

With the ongoing solicitations, SEMI would like to continue to alert you with questionable professional practices perpetrated against exhibitors by (Austria) and Expo Guide (Mexico), Event Fair - The Exhibitors' Guide with their misleading directory services. There may be others that we are not aware of and are hence not named here. 

These companies provide legitimate exhibition guides aimed at exhibitors across the globe offering online listing services. They use a form which resembles and organizer's free catalogue listing service, inviting exhibitors to complete the form for an entry in an on-line directory. Unsuspecting exhibitors who sign and return the form are then contracted into a three-year, non-retractable agreement, which could cost the exhibitor a significant amount of money, with very limited foreseeable benefits. The details are often available on the form itself, but are often too small and insignificant to be noticed. It is always wise to really the small print before signing a contract, and if the information is impossible to read then the contract should not be signed. These publications have no connection with SEMI or any of our events, and it is important that all companies are made aware of this. 

Should you receive any communication from the Expo-Guide and or related company, please IGNORE THEM COMPLETELY and DO NOT COMMUNICATE WITH THEM IN ANY WAY.

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