ESOL

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ESOL
a pioneer in the
EUV industry
where
disruptive innovations
are born
making
human life better
through EUV
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About ESOL

The world’s leading EUV Solutions

Founded in December, 2017, E-SOL, Inc. pioneers laser-based and metrology solutions designed for EUV Lithography.
Our expertise in laser, optics, system engineering and High Harmonic Generation (HHG) EUV source enables chip makers to achieve their success in EUV Lithography. E-SOL, Inc. with a great ambition to become the world’s leading solution provider of EUV solutions will strive for the highest standards and breakthrough technologies.
Products

ESOL Products

We provide solutions for various applications of EUV Lithography with expertise in laser, source and system technology.
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SREM
Scanning Reflection EUV Microscopy
Ephase
EUV Phase Measurement System
EUVPTR
EUV pellicle transmission and reflectance measurement system
EMiLE
EUV Micro-interference Lithography Equipment