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Exhibit
Jan 31- Feb 2, 2018
COEX
Seoul, Korea
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Category: 203 Equipment, Inspection & Measurement (Overlay Measurement)
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Wednesday, Feb 01 2023
Thursday, Feb 02 2023
Friday, Feb 03 2023
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12 Exhibitors
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101 Photovoltaic Device Manufacturing
PV: Cells
PV: Modules
PV: Stand-Alone Systems
Solar Thermal
200 Equipment, Assembly
Backgrind; Slicing; Lapping; Polishing Equipment
Ball Placement; Attach Systems
Base Loader Systems
Cleaning; Washing Equipment for Assembly & Packaging
Cut & Down Set; Trim; Form Equipment
Deflashing; Degating Tools
Device Handling; Feeding Systems
Dicing; Sawing; Scribing; Separation Equipment
Die Bonding; Attach Equipment
Die Removal Equipment
Die Sorter; Pick & Place; Flip Chip Placement Systems
Dispensing Systems
Hot Embossing System
Lead Frame Taping Systems
Lithography Systems for Wafer Level Packaging; Bumping; 3D Interconnect Aligners
Marking; Imprinting; Labeling Equipment
Molding; Encapsulation; Decapsulation Equipment
Package Handling; Conveying Equipment
Package Simulation; Characterization Equipment
Plating; Electro Chemical Plating for device assembly
Printing Equipment; Screen-printing; Alignment ; Film Printing
PROM; Memory Programmer Equipment
Solder Reflow; Soldering & Brazing Equipment
Tape Automated Bonding (TAB); Bumped Tape Automated Bonding (BTAB) Equipment
Wafer Level Bonders
Wafer Mount; Taping Equipment
Wire Bonding Equipment
201 Equipment, Flat Panel Display
Alignment Film Coating Equipment
Anodic Oxidation Equipment
Color Pattern Processing Equipment
Laser Treatment; Cutting Systems for Panels & Photocells
Liquid Crystal Injection or Filling Equipment
Low Pressure Plasma Spray (LPPS) Equipment
Panel Alignment; Cell Assembly Equipment
Rubbing Equipment
Scribe and Break Equipment
Seal Patterning Equipment
Spacer Spraying Equipment
202 Equipment, General Use
Cutting; Drilling; Laser ablation; Beveling Equipment
Heating; Annealing; Curing Equipment - Furnaces; Conveyors; Ovens; Test Chambers; Heat Treating
Lamination; Sheet Laminating Equipment
Repair; Rework Equipment
Sealing; Bagging; Packing Equipment
Space simulation; Vacuum chambers
Vacuum drying & out gassing Systems
Vibration Isolation Systems
Vision; ID; Bar Code Systems
Welding Equipment
203 Equipment, Inspection & Measurement
Acoustic Spectroscopy; Electron Spectroscopy for Chemical Analysis (ESCA); Ultrasonic; Acoustical Mi
Air Velocity (VA) Humidity and Moisture Sensing
Centrifuges
Chromatograph
CV (capacitance-to-voltage) Probe systems
Defect; Particle; Bump; Contamination Detection, Review or Inspection
Die Inspection; Die Shear
Fiber Optic Inspection Instruments
Film Thickness; Thickness; Uniformity Measurement; Ellipsometer
Flat; Notch Finding System
Instruments; Bench Top Test
Leak Detection Systems - Vacuum or Gas
Line Width; Critical Dimension (CD) Measurement
Microscopes: Atomic Force Microscopes (AFM)
Microscopes: Confocal Scanning Microscope; 3-D Video Microscopes
Microscopes: Optical Microscopes
Microscopes: Scanning Electron Microscope (SEM); Focused Ion Beam (FIB), Transmission Electron Micr
Overlay Measurement
Package Inspection; Lead Scanners
Particle Monitors; Analyzers - Airborne or Liquid
Plate Inspection Equipment
Resistivity Measurement; 4 point probe; Sheet resistance
Spectrometers; Fourier Transform Infrared (FTIR); Attenuated Total Reflectance FTIR (ATR-FTIR); Auge
Stress; Refractive Index; Reflectivity & Conductivity Measurement
Thermal Sensing, Measurement, Analysis
Wafer; Substrate Metrology; Topology; Nanotopography; Flatness Measurement; Crystalline Orientation
Weight measurement; precision scales
Wire Bonding Inspection; Test
X-ray; XRF; 3-D X-Ray; LEXES Systems
204 Equipment, Mems
Deep RIE etching; Dry Etching
Double sided mask aligner
Wafer Level Bonders
205 Equipment, Nanotechnology
Equipment, Nanotechnology Tools
206 PV Equipment
Cells
Inspection and Metrology
Integration and Automation
Modules
Other
Thin Film
Wafers
207 Equipment, Process
Bumping Systems
Chemical Mechanical Polishing (CMP); Electro Polishing, Mechanical Polishing Equipment
Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
Coat; Develop; Resist Processing; Track Equipment
Crystal Growing & Machining Equipment
Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
Environmental Enclosures; Minienvironments
Epitaxy Equipment; Epi Reactors; Molecular Beam Epitaxy (MBE); Atomic Layer Epitaxy (ALE)
Etching; Stripping; Ashing - Dry and Wet Equipment
Ion Implantation Equipment
Ion; E-Beam Milling Etching Equipment
Lithography; Exposure; Aligners; Direct Write Systems; Steppers; Scanners; Nanoimprint
Plating; Electro Chemical Plating; Deposition Systems
SOI Bonders; Temporary Bonders; De-Bonders
Spin on Glass (SOG); on Dielectric (SOD) Track systems
Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment
Transfer Systems for Wafer; Reticles or FPD's
Wafer Identification; Marking Equipment
208 Equipment, Test
Burn-In Accessory Systems
Burn-In Systems
Circuit Repair; Design Modification; Redundant Memory Repair; Mask Repair Systems
Discrete Component Test Systems
Environmental Stress Systems - Temperature; Humidity; Pressure; HAST
ESD; EMS and Latch-up Systems
Failure Analysis Systems
FPD Test; Measurement; Repair Equipment
Functional Test Systems
Handlers; Positioner Systems
Linear Test Systems
Logic Test Systems
Memory Test Systems
Optical Test Systems
Package Test Systems
Parametric Test Systems
Printed Circuit Board; Wire Board (PCB or PWB) Test and Repair
Probe Card Maintenance and Analysis Systems
Probing Equipment incl. Analytical; Circuit; Manual; E-Beam; Optical; Wafer Probers
System on a Chip (SOC); Mixed Signal Test Systems
Test Contactor Cleaning; Conditioning Systems
Test Head Manipulators and Docking Stations
Wireless, non-contact Test Systems
300 Materials, Assembly
Adhesives; Epoxies; Die Attach Compounds; Under fill Materials; Conductive & Non-Conductive
Bonding; Interconnect Materials - Wire; Ribbon; Tape; Capillaries & Tools
Lead Frames & Headers: Etched; Stamped
Molding; Encapsulation; Potting; Resin Materials
Package Substrates; Laminate; Film based
Packages; Ceramic and Other High Temp Compounds
Packages; Plastic
Printed Circuit Boards (PCB); Printed Wire Boards (PWB)
Scribe Tools; Saw or Dicing Blades and Accessories
Solder; Solder Balls and other Soldering Materials
Tape Automated Bonding (TAB) Accessories
Thermal Interface Materials; Heat Sinks
Thick Film Pastes; Materials
Thin Film; Dielectric Film Materials
301 Materials, Chemicals & Solids
Acids; Etchants
Buffers; Alkalis; Bases
Cleaning Chemicals; Solvents; Strippers
DI; UP Water
Dopants; liquid or solid
Other Specialty Chemicals
Photo Resist; Developers & Ancillaries (incl. Adhesion promoter (HMDS); Primer; Anti-Reflective Coat
Solids
Spin on glass material
Surface protection material; coatings
302 Materials, FPD
Alignment Film Materials
Color Filter Materials
Glass Plates for FPD
Liquid Crystal Materials
Polarizer Materials
303 Materials, Gases
Analytical Instrumentation Mixtures
Dopant Gases
Environmental Compliance Mixtures
Etchant Gases
Fuel Gases
Laser Gas Mixtures
Other Specialty; Mixed Gas
Pure & Bulk Gases
Rare; Noble Gases
Reactant Gases
Silicon Precursor Gas
304 Materials, Mask Making
Mask and Reticle Handling Products
Mask plate blanks; Glass
Pellicles; Mounting Fixtures
Plate or Pellicle Repair & Materials
Transfer lithography masks; Polymer masks; templates (for Nanoimprint)
305 Materials, Nanotechnology
Materials, Nanotechnology
306 PV Materials
Consumables
Gases and Liquid Chemicals
Ingots, Wafers
Other
Solar Glass, encapsulation
307 Materials, Process
CMP; Grind; Lap; Polish; Abrasive materials
Deposition Supplies
Deposition/Target Materials
Ingots
Photo Masks; Finished or Patterned
Plasma; Ion Sources
Plating Materials
Process Chamber Components; Graphite; Carbon Fiber Carbon (CFC); Pyrolytic Boron Nitride (PBN)
Quartz ware (Silicon Carbide, Fused Quartz Glass, Sapphire), Ceramic & Oxide Ceramic Fixtures
308 Materials, Substrate
Compound Semiconductor substrates (GaAs on Silicon; GaN; InP; SiGe, etc.)
Diamond substrates
Epitaxial; Epi; Gettered; Internal Gettered Wafers
Prime; Polished; Mirrored Wafers
Silicon on Insulator (SOI); Silicon on Sapphire (SOS); Silicon Carbide;
solar cell substrates; crystalline silicon (c-Si); thin film
Strained silicon; Engineered Substrates
Test; Monitor Wafers; Reclaim or Virgin
Thin & Thick film substrates for MEMS
309 Materials, Test
Burn-In Boards; Performance Boards (incl. Low; High Temp and Ceramic)
Probe Cards; DUT boards and other probing accessories (incl Ceramic and Special Purpose Probe Cards)
Structural Circuits; Test; Thermal Fixturing
Test Sockets; Contactors and Contact accessories
400 Components, Parts & Accessories
Bearings; Shaft Collars
Chucks for Wafer and other Substrates
Computer Accessories; Peripherals; Upgrades; Service
Connectors; Plugs; Interconnects; Cable; Wire
Electronic Hardware; Fixtures and Supplies
Enclosures; Cabinets
Fasteners; General Hardware
Filters for Liquid; Oil
Filters, Getters, Purifiers, Catalysts for Gases
Flow Control Components - Valves; Meters; Gauges; Regulators; MFC's
Gaskets; Seals; O rings; Elastomers; Resins
Heating elements; coils; insulation; vestibule blocks and other Furnace components
Magnetic Components; Heads
Motors; Fans; Electric Rotary Spindles
Piezo Electronic Components
Pipe; Tubing; Hose; Flanges; Connectors; Couplings; Plumbing Fittings
Raw Material & Custom components; Metal
Raw Material & Custom components; Plastic
Sealants; Adhesives; Finishes
Sensors
Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants; p
Windows
401 Sub-systems
Cameras - Still; CCD; Video & Monitors
Computer ; Control ; Communication ; Data Acquisition Systems
Electron tube & Ion Beam Apparatus & Sources
Gas; Liquid delivery panels as subsystems
Handling; Transfer; Loading Systems; Lifting devices
Hydraulic Systems
Motion control systems; Servo control systems & Components
Optics; Lens Products; Auto-Focus Systems
Plasma Sources; Controls; Monitoring; Diagnosis
Pneumatic Systems; Pneumatic rotary spindles
Power Supplies; RF Generators; Converters; Electrical Conditioning
Process Monitoring systems
Pumps, for Fluids
Pumps, Vacuum
Temperature Sensing; Control; Recirculators; Chillers; Heat Exchangers
Ultrasonic Generators; Transducer and Monitoring Systems
402 PV Systems
Measurement & Control Technology
Stand-Alone Systems
500 Factory Monitoring & Control Systems (FMCS)
Chemical; Pure Water; Fluid Handling; Storage; Supply Systems
Chemical; Pure Water; Fluid Monitoring & Control Systems
Data Collection; Building control systems
Electrical; Power Distribution
Emergency (fire) & Security Control Systems
Environmental; Utility Systems & Monitoring
Equipment Interface; Communication Protocols
Gas and Other Generation Systems
Gas Handling - Cabinets; Control; Supply Systems
Gas Monitoring Equipment; RGA's; TGO compliance
Logistics; Floor Control Systems
Process Controls
Waste Control; Effluent Management Systems (Fluid & Gas; Exhaust Conditioning; Scrubbers)
501 HVAC, Temperature, Humidity, Contamination Control
Clean Rooms
Contamination Control; HEPA Filtering Systems
HVAC; Temperature; Humidity Systems and Control
502 Material Handling Systems
Conveying; Material Handling Systems
Robotics; Transfer Systems
Static; ESD Control
Stockers; Storage, AMHS
600 Communication Software
Equipment Interface; Communication Protocols
601 Design Software
CAD - Computer Automated Design
EDA - Electronic Design Automation; Circuit Design
602 Manufacturing Software
CAM or CIM - Computer Aided Manuf'g; Computer Integrated Manuf'g
Factory Automation; Cell Controller Software
Manufacturing Execution Software (MES)
Production Control software
Test Programs
Yield Mgmt; Process Control Software
603 Simulation, Analysis; Modeling Software
Mask Making software & simulation
Simulation; Characterization; Verification Software
700 Manufacturing Services
Building Maintenance
Burn-In Service
Calibration & Reference Standards
Certification; Compliance; Independent Laboratories
Deposition Service
Etch; Strip; Cleaning Service
Failure Analysis and other Analytical Services
Ion Implant Service
Laundry service; Cleanroom Garments and other
Lithography; Patterning service
Machine Shop; Fabrication Service
Mask Making Fabrication and Repair
Measurement; Inspection Service
Micro Machining services (small hole drilling and milling)
Parts Cleaning; Micro Contamination
Plating; Electro Polishing; Coating; Surface Treatment
Reclaim Services (Evaporation; sputtering source material; Precious metal reclaim; Scrap; Vacuum pum
Repair; Rebuild; Install Equipment; Maintenance Services; Spare Parts
Used; Rental Equipment; Inventory Reduction, Appraisal - Brokers; Resellers
Wafer Bumping Service
Welding; specialty welding services
701 Manufacturing Services or Consulting
Assembly
Automation & Robotics
CAD; CAM; CIM
Circuit Design; Electronic Design Services (EDS); System Level Design (SLD)
Clean Room; Contamination Control
Environmental; Health & Safety and Hazardous Material (HazMat)
Equipment; Hardware; Product Design, Integration and Manufacturing
Facilities; Building Environmental Systems Design & Monitoring; Alternative Energy Solutions
Factory; Industrial Control; Utilization & Automation
Flat Panel Display (FPD) Design & Manufacturing
Manufacturing Process Support and Development
Nanotechnology Intellectual Property Development; Research
Package Materials; Interconnect; Subcomponent; Subassembly Design Services
Product Development; Software Design; Product Lifecycle Management
Software Programming; Software Development
Static; ESD Testing & Control Services
Technical Intelligence; Reverse Engineering
Test Services or Consulting
Wafer Fab Operations and Design
Wafer Handling
Waste Control; Disposal Design
800 Associations
Associations; Trade or Industrial
Professional Societies
801 Distribution and Logistics
Crating; Packaging
Customs Clearance; Import/ Export; Freight Forwarders
Distribution, Warehousing, 3rd Party Logistics Providers (3PL)
802 Educational; Research Institutions
Education; Research Institutions (For-Profit); Vocational Training
804 Professional Services
Marketing or Sales Consultants
Operations; Management Consulting
Purchasing; Procurement; Materials; Supply Chain Management Services
Sales; Manufacturers Representation or Distributors
805 PV Services
Research and Development
900 Support Products
Analytical Standards; Calibrators
Clean Room Supplies; Cleaning Supplies
Device; Wafer; Display Panel Handling Products
Garments ; Apparel
Safety
Tools
901 Solar
Inverters
Measurement and control technology
PV concentrator systems
Solar chargers and batteries
Solar research and solar-powered small devices
Solar thermal applications for heating, process heat and cooling
Tracking systems
902 Other
Other
903 LED
FPD Array Designing Tool
FPD Array Processing Equipment, Materials and Parts
FPD Color Filter Processing Equipment, Materials and Parts
FPD Facility, Environment System
FPD Glass Substrate Processing Equipment, Materials and Parts
FPD Inspection Equipment, Materials and Parts
FPD Panel and Module
FPD Photo Mask Processing Equipment, Materials and Parts
Heat-conduction Material for LED, Optical Lens
High-Brightness LED and High-Powered Devices
LED Display (single-color, Bi-color and Full color)
LED Epitaxial Wafers, Chips and Lighting Material
LED Lighting Products (Specific Lighting, House-Lighting)
LED Manufacturing Material and testing Instruments
LED Package Material
LED Substrate Material and Interrelated Chemical Material
Micro Display Panel and Other Flad Panel Display
OLED Related Equipment and Materials, Panel and Module
Publishing, Other Services
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Company Name
Booth No.
AUROS Technology, Inc.
D120
Basler Korea
B708
EV Group Korea Ltd.
A644
FEMTOMETRIX
B435
KLA Corporation
D636
KLA Corporation
D800
Limotion Systems
A667
Nexensor Inc.
B906
Onto Innovation Korea
D330
SCREEN SEMICONDUCTOR SOLUTIONS Co., Ltd.
D612
Woowon Technology Co., Ltd.
A210
ZEISS Korea (Carl Zeiss Korea)
D530