02-531-7800

AVACO

Daegu, 
Korea (South)
http://www.avaco.com
  • Booth: B736


AVACO, providing complete solution in the high-tech industry

AVACO is a comprehensive equipment company that manufactures core equipment for the display, semiconductor, secondary battery, and micro-electronics industries. AVACO is developing technologies together with global research institutes to secure next generation semiconductor technology. AVACO manufactures metrology & inspection system and process equipment.


 Products

  • Metal Sputtering System (AVALAN)
    Multi-purpose ultra-purity metal films manufacturing system by strictly controlling the film properties for semiconductors....

  • Multi-purpose ultra-purity metal films manufacturing system by strictly controlling the film properties for semiconductors

    Available up to nine process chambers including optional (multi) degas and pre-cleaning

    A flexible system for mixing and matching chambers to apply multi-step process sequence

    Demonstrates high reliability and provides more CoO benefits

  • Macro Inspection System(Ostri-M)
    Macro inspection system is high-performance optical system that detects, identifies, and classifies foreign materials and pattern defects on the surface and edge of the wafer through the wafer inspection and review system....

  • Measure and analyze the defect image by receiving location coordinates of defects from the macro inspection system

    Measure the defect image using a high magnification lens

    Detect defects to the um level by applying the inspection function

    Bright field and dark field review available

  • 3D Inspection System(Ostri-W)
    3D inspection system is a high-performance optical system for measuring the height and obtaining topological information of the wafer non-contact methods through the wafer inspection and review system....

  • Measure and analyze the defect image by receiving location coordinates of defects from the 3D inspection system

    Measure the defect image using a high magnification lens

    nm level shapes can be detected by applying the 3D inspection function

    3D mapping and review available

  • Wafer Metrology System
    Wafer metrology system that uses non-linear optical Second Harmonic Generation (SHG) technology for interface charge state metrology and detecting changes in crystalline and film properties, capable of monitoring process variations and excursions....

  • Fast, non-contact, non-destructive

    Patterned and bare/blanket film wafers

    In-line process excursion monitoring

    Interface charge state measurement

    Crystal and film property measurement