AhTECH LTS Co., Ltd.

Our UV Ozone Cleaner cleans the substrate surface in a short time using a high-power UV Grid Lamp.

With high power and excellent Uniformity, Grid Type Lamp can generate ozone, decompose organic surface contaminants, and evaporate quickly into volatile compounds to create a clean surface without damaging the sample.

We handle a wide range of materials for a wide range of applications and have products of various sizes. Per each machine’s spec, it can be tested with no limitation.

* Our non-contact surface resistance measuring equipment uses Eddy Current's principle to measure surface resistance and thin film thickness without damage.

- Various types of equipment such as Manual Type, Semi Auto, Inline type, Full Auto, etc.

- It is possible to measure samples in various fields such as film, wafer, glass, foil, etc.

- Simultaneous measurement of surface resistance and thin film thickness

- Unlike the 4-point probe, the surface is not damaged by non-contact measurements

- Quick measurement is available

- Measurement of conductive material enclosed by insulation

- Even soft-surface samples can be measured

- Measurement of conductive thin film thickness available

Challenging and/or diagnostic samples, representing leading edge of key semiconductor technologies, are crucial for application development, for developing, evaluating, monitoring & calibrating equipment, and for collaborating with other entities. Access to such samples also determines which experiments are possible and what can be published externally versus internally, and can limit advertising options. 

The AMAG7 reticle is a comprehensive new advanced metrology patterning reticle and test pattern collection, derived from SEMATECH AMAG’s AMAG4/5/6 and modernized to today’s metrology and processing community’s needs. 

Our product includes turret-based and linear pick-and-place handlers, as well as customized solutions that incorporate the advantages of both designs.

Small size package inspection, functional test and pick & place (Tape & Reel)

- Processes: Orientation, Flip, Test, Vision Inspection, Laser Marking, Repark, Retest, Reject, and sort.

Core Technology & Products

- Specialized for small size product handling with high input/ output loading flexibility

- Turret Systems (Advanced turret system)

  * Input: Bowl/ Tube/ Tray/ Reel

  * Output: Tape & Reel + Others (Tube/ Bulk/ Tray/ Dual Type)

  * Major functions: Visual & laser mark inspection, Functional test 

- Pick and Place