Register
Exhibit
Jan 31- Feb 2, 2018
COEX
Seoul, Korea
C&I Tech.
Daejeon,
Korea (South)
http://www.cni-tech.co.kr
Booth: C226
Thank you for Alicat Scientific booth visiting!!!
Categories
202 Equipment, General Use
Heating; Annealing; Curing Equipment - Furnaces; Conveyors; Ovens; Test Chambers; Heat Treating
Space simulation; Vacuum chambers
203 Equipment, Inspection & Measurement
Thermal Sensing, Measurement, Analysis
207 Equipment, Process
Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
Epitaxy Equipment; Epi Reactors; Molecular Beam Epitaxy (MBE); Atomic Layer Epitaxy (ALE)
Etching; Stripping; Ashing - Dry and Wet Equipment
Lithography; Exposure; Aligners; Direct Write Systems; Steppers; Scanners; Nanoimprint
Thermal Processing - Diffusion; Oxidation; Annealing; RTA; RTP Equipment
303 Materials, Gases
Analytical Instrumentation Mixtures
Dopant Gases
Environmental Compliance Mixtures
Etchant Gases
Fuel Gases
Laser Gas Mixtures
Other Specialty; Mixed Gas
Pure & Bulk Gases
Rare; Noble Gases
Reactant Gases
Silicon Precursor Gas
400 Components, Parts & Accessories
Flow Control Components - Valves; Meters; Gauges; Regulators; MFC's
Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants; p
401 Sub-systems
Gas; Liquid delivery panels as subsystems
Pumps, Vacuum
500 Factory Monitoring & Control Systems (FMCS)
Environmental; Utility Systems & Monitoring
Gas Handling - Cabinets; Control; Supply Systems
Gas Monitoring Equipment; RGA's; TGO compliance
Process Controls
Waste Control; Effluent Management Systems (Fluid & Gas; Exhaust Conditioning; Scrubbers)
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Appointment Date*
Wednesday, Feb 01 2023
Thursday, Feb 02 2023
Friday, Feb 03 2023
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Wed Feb, 01
Thu Feb, 02
Fri Feb, 03
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