▉Overview
AdvancedAce®Ⅱ is KOKUSAI ELECTRIC CORPORATION’s latest platform for batch thermal processing of 300mm wafers.
The AdvancedAce®Ⅱ offers high throughput by utilizing advanced technologies in such areas as temperature control, wafer handling automation, reactor purging, and temperature ramping.
▉Process Applications
・LP CVD ・Oxidation
・Anneal(Low temp, High temp) ・Diffusion
▉Features
・Achieved high productivity: Improved 1.5times(*) larger lot
processing in a time (* Compared with previous model)
・Capable of conformal films into deep trench
・Realized high accurate, high quality film deposition in low temperature
・Health check function (Option)