KYUNGWON TECH CO., LTD.

Seongnam-si, Gyeonggi-do
Korea (South)
http://www.kw-tech.co.kr

Booth: A205

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Etching/Deposition Profile and Plasma Simulator Provider

Since Kyungwon Tech was established in 1998, we has been providing comprehensive consulting services in the field of computational fluid analysis and plasma processing. We have developed our engineering software K-SPEED (3D feature profile simulator for plasma process). We are also providing consulting services as a domestic distributor of SimericsMP, Barracuda, CAESES, CFturbo and VizGlow.

Kyungwon Tech has worked for numerical simulation of plasma processing of microelectronics industry and commercialized 3D etching profile simulator in 2013, K-SPEED, focusing on deep etching of semiconductor process. Due to the unique plasma reaction data of C₄F₆, C₄F₈, and other gases, it has given insight of semiconductor etching process and made a good success, which was not available in the past. It can be applicable to other etching and CVD processes in the future.

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K-SPEED

Ultra-fast 3D feature profile simulation for plasma processing of microelectronic industry... More Info Less Info

K-SPEED is a simulator for plasma etching profile to predict etching profiles and accompanied phenomena such as bowing, necking, etch stop, polymer passivation via effective computation taking into account various physical and chemical effects essentially which affect on dry etching process.

K-Plasma (0D)

Bulk plasma simulator... More Info Less Info

K-PLASMA (0D) is a bulk plasma simulator to predict essential properties of the plasma using spatially zero dimensional approach.
K-PLASMA (0D) provides plasma parameters such as ion flux, ion incidence angle, plasma density from practical environmental variables(power, pressure, gas flow etc.) of plasma processing.

VizGlow

For high fidelity non-equilibrium plasma modeling... More Info Less Info

VizGlow is a robust, industrial simulation tool for high-fidelity modeling of non-equilibrium plasma discharges.

As part of the OverViz Simulation Suite, it can be fully coupled with electromagnetic, fluid flow, and kinetic particle models to provide solutions to a wide range of complex multiphtsics problems. It han been used to analyze discharges ranging from low pressure plasma reactors at a few mTorr to high pressure streamers at 15atm, all with a single solver.

VizGlow is fully parallelized and can be used to perform large, 3D simulations with complex geometries. Its robust solvers and scalability make it ideal for solving real world engineering ploblems.

KYUNGWON TECH CO., LTD.

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