Jan 31- Feb 2, 2018 COEX Seoul, Korea
AVACO, providing complete solution in the high-tech industry
AVACO is a comprehensive equipment company that manufactures core equipment for the display, semiconductor, secondary battery, and micro-electronics industries. AVACO is developing technologies together with global research institutes to secure next generation semiconductor technology. AVACO manufactures metrology & inspection system and process equipment.
Multi-purpose ultra-purity metal films manufacturing system by strictly controlling the film properties for semiconductors
Available up to nine process chambers including optional (multi) degas and pre-cleaning
A flexible system for mixing and matching chambers to apply multi-step process sequence
Demonstrates high reliability and provides more CoO benefits
Measure and analyze the defect image by receiving location coordinates of defects from the macro inspection system
Measure the defect image using a high magnification lens
Detect defects to the um level by applying the inspection function
Bright field and dark field review available
Measure and analyze the defect image by receiving location coordinates of defects from the 3D inspection system
nm level shapes can be detected by applying the 3D inspection function
3D mapping and review available
Fast, non-contact, non-destructive
Patterned and bare/blanket film wafers
In-line process excursion monitoring
Interface charge state measurement
Crystal and film property measurement