The new in-line, fully-automated SIMS tool from CAMECA: high quality SIMS data without need of SIMS experts.
The new AKONIS platform fills a critical gap in the semiconductor fabrication process by providing a fast tracking of compositional changes and conformity directly in the fab line.
Complementing the IMS Wf / SC Ultra as well as the SIMS 4550 (quadrupole SIMS) currently used to support the semiconductor industry via off-line characterization labs, AKONIS is the only in-line, fully automated Secondary Ion Mass Spectrometer (SIMS) that enables high precision SiGe and SiP process monitoring with no compromise on analytical sensitivity.
AKONIS benefits from the most recent development in EXtremely Low Impact Energy (EXLIE) ionic column technology, coupled with a full wafer handling system including a high-resolution stage which permits to address process nodes down to 5nm. Compliant with all automation requests of modern 300mm fabs, the tool provides almost instantaneous composition and doping information in the most complex stacks. Other capabilities include: blanket and patterned wafer measurements in pad down to 35µm. Intuitive recipe creation making SIMS data accessible to non-experts.
Bringing the new AKONIS SIMS tool to the line proves time saving and cost effective: production stands are made shorter as no time is spent waiting for data, and the number of misprocessed wafers is reduced by more frequent monitoring.
For more information, contact cameca.info@ametek.com