CSK Inc.is a professional manufacturer/supplier that provides treatment solution for exhaust gas that occurs in the semiconductor/LCD manufacturing process and the next generation precursor delivery system.
CSK Scrubber focuses on purification of hazardous and toxic gases from semiconductor manufacturing process. As a variety of the products used by catalytically active chemisorbents, high temperature (in) direct oxidation reaction, wet treatment and high energy of plasma, CSK Scrubber allows fine-tuning to all relevant process gas and ensures maximum efficiency and minimum maintenance requirement.
CSK also produces TCT and TDS System. TCT System (The Tri-chemical Delivery System) is to assure a safe and consistent supply of ultrahigh purity liquid precursor. TDS System (The Terminal Delivery System) is especially designed to dispense ultra-high purity liquids to process tools in the semiconductor and fiber-optic industries.