CYMECHS

Gyeonggi-do,
Korea (South)
http://www.cymechs.com

Booth: C450

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Dream on. Everything is possible with Cymechs!

CYMECHS is a venture company that produces and supplies wafer handling robots and transfer chambers required for the entire semiconductor process. As the only producer of semiconductor vacuum robots, we export our products to the US, Japan.

Products

Transfer Module

Cymechs provides the Aries series of 300mm vacuum transfer module. Available in 4, 6 and 7 sided configurations, the Aries Transfer module features a compact footprint while maintaining Cymechs’s world reputation for high reliability and durability. ... More Info Less Info

ARIES-A400

– Possibility to install maximum 6 PMs
– Transfer 2 wafers to PM at the same time
– Load lock : DUAL STACK TYPE
– Load lock option : Consists of Cooling plate, Pre-Heater

ARIES-A600

– Possibility to install maximum 4PMs
– Load lock : ANGLE Type
– Load lock option : Consists of Cooling plate, VCE(Vacuum Cassette Elevator)

ARIES-Inline

– Possibility to install maximum 4 PMs
– INLINE Type TM – Use of 2 VACUUM ROBOTS
– Load lock : STACK Type
– Load lock option : Consists of Cooling plate, Pre-Heater

ARIES-A600-450(450mm)

– Possibility to install maximum 5 PMs
– Extendable TANDEM-TM structure
– Design Footprint optimally
– Load lock : STACK Type
– Utility option : Consists of PM GAS, CDA, PCW
– 450mm VTM Robot

EFEM (Equipment Front End Module )

An Equipment Front End Module (EFEM) is the mainstay of semiconductor automation, shuffling silicon wafers between ultra-clean storage carriers and a variety of processing, measurement and testing systems.... More Info Less Info

PHOENIX Series

Design Footprint optimally

FFU RPM MODE, Pressure MODE

Possibility to install PM-ELEC RACK on the top of EFEM

PHOENIX-P200

– Install 2LPM
– Option : ALIGNER, Light curtain area sensor, Protection BAR

PHOENIX-P300

– Install 3LPM
– Apply for LINEAR TRACK MODULE
– Option : ALIGNER, Side storage, Light curtain area sensor, Protection BAR

PHOENIX-P400

– Install 4LPM
– Apply for LINEAR TRACK MODULE
– Option : ALIGNER, Side storage, Light curtain area sensor, Protection BAR

PHOENIX-P300-450(450mm)

– 2LPM (Possibility 3LPM)
– Design Footprint optimally
– Option : ALIGNER, Light curtain area sensor, Protection BAR
– FFU RPM Mode, Pressure MODE
– Possibility to install PM-ELEC RACK on the top of EFEM
– 450mm ATM Robot
– 450mm LPM

LPM(Load Port Module)

LPM includes a plate to support at least one substrate, a sensor to detect foreign matter at a predetermined location, and a cleaner to remove the foreign matter at the predetermined location when the foreign matter is detected by the sensor.... More Info Less Info

VEGA Series

Wafer Notch Finding & Centering Center

DELTA PICK & PLACE Mode

VEGA-300C-V

– VACUUM GRIP Type
– Option : LIFT PIN MODULE
– Various Robot End-Effectors

VEGA-P300N-PS

– PASSIVE Type
– Minimize particles on Wafer backside from Wafer Edge Contact
– LIFT PIN MODULE

Robot (ATM Robot, VTM Robot)

Cymechs keep developing Intelligent Robot series. ... More Info Less Info

ATM Robot

QUADRA-QA-34,44

– QUADRA ATM Robot
– 200mm, 300mm Wafer
– Single arm(3 axis), Dual arm(4 axis)
– S-curve motion
– Z-stroke 300mm / 400mm
– Repeatability < 0.1mm (3σ)
– End Effector type : Vacuum grip, Edge grip, Passive
– Servo motor, Absolute encoder

VTM Robot

QUADRA-QV400, QV600

– QUADRA VTM Robot
– High vacuum environment
– 200mm, 300mm wafer
– Dual arm (4 axis), Quad arm (6 axis)
– Z-stroke 50mm / 120mm
– Repeatability < 0.1mm (3σ)
– Servo motor, Absolute encoder

Aligner

VEGA Series Wafer Notch Finding & Centering Center DELTA PICK & PLACE Mode ... More Info Less Info

•VEGA-300C-V : VACUUM GRIP Type

•VEGA-P300N-PS : PASSIVE Type