INFICON

https://www.inficon.com/en

INFICON Transpector APX remains the market leading Residual Gas Analyzer (RGA) for semiconductor and display process monitoring. INFICON knows semiconductor and display customers have unique needs, and the latest revision of the Transpector APX allows for more flexibility to meet specific application requirements, while maintaining industry leading measurement speed and sensitivity. Transpector APX is the ideal RGA process monitor for semiconductor processes such as ALD, CVD, PVD, and etch.

ADVANTAGES AT A GLANCE
- Application specific platform design enables unique configurations for longest lifetime on your ALD or CVD process for the best wafer and panel protection and process optimization, for example endpoint detection.
- EUV fab ready with specific ion source and inlet designs optimized for the lowest level hydrocarbon contamination detection.
- Process integration—Transpector APX becomes a powerful process monitoring and diagnostics tool when integrated with FabGuard® software and supported by INFICON world-class applications experts
- Smaller fab footprint and easier installation due to new high performance pumping system. 30% smaller with
higher pumping speeds and adjustable heaters that lower system background for superior detection limits.
- Configurable with Hexblock for up to three pressure inlets or simplified inlets for specific pressure ranges, designed for reduced surface area to minimize surface reactions and provide the fastest response times.
- Proprietary system coatings provide industry leading chemical resistance and compatibility for highly aggressive processes
- Automated calibration—ensures long-term data stability and accuracy for sensor to sensor and tool to tool
chamber matching

https://www.inficon.com/en/products/UL6000-Fab#Overview

The UL6000 Fab series by INFICON is not only the most precise, durable and reliable testing system on the market, it also saves time throughout the testing sequence. These benefits, along with the intuitive handling, help your pit crew find even the smallest leaks in record time.

ADVANTAGES AT A GLANCE

- INNOVATIVE BOOSTER PUMP

• Speed and precision, shorter response times and quicker helium removal, especially with large volumes

- VACUUM BACKING PUMP

• Shortest pump-down time, very durable, requires minimal maintenance, resists water vapor pressure

- ROBUST VACUUM SYSTEM

• Extremely resistant against unintentional shock venting, requires only minimal maintenance

- I∙CAL – exclusively by INFICON

• Time-saving software algorithm, reduces noise to a minimum without missing details such as the slightest real signal peak

- I∙ZERO 2.0 – exclusively by INFICON

• Low helium background in the briefest time, reliably detects even the smallest leaks

- MASSIVE MODE – exclusively by INFICON

• Leak testing beginning at atmospheric pressure, spray method detects large leaks as well

- HYDRO∙S – exclusively by INFICON

• Eliminates the water content in the signal to quickly reach a low background at the beginning of the test

- I∙CHECK – exclusively by INFICON

• Measures helium concentration in the environment to ensure optimum measurement conditions

- I·RISE – exclusively by INFICON

• Provides in-device rate-of-rise measurement combined with helium spraying method