AhTECH LTS Co., Ltd.

Non Contact Resistance & Thickness Measurements System 

- Non-contact measurement is possible using eddy current.

* Automatic contact angle meters (FOUP) 

SURFTENS WH 300 is equipped with a 3 axis wafer robot, wafer scanner, loadport for 200 and/or 300 mm wafers, fan filter unit, notching system.

Suitable for any cleanroom class it features the automatic mapping of contact angles on wafers for up to 25 wafers.

New: with SECS/GEM Interface!

Here you can see a little video of SURFTENS WH300

-https://youtu.be/whR8E1yTHC8?si=IMztEBNsPIP47Aia

* Pressure ovens manufactured with a triple safety design in various sizes

Advantages

- Double chamber design

- Original fan mechanism

- Safety design

Application 

- Void elimination in film 

- Impregnation effect

- Void elimination of die bonding tape

- Epoxy resin for encapsulation

* Calibration Wafers

The AMAG7 reticle is a comprehensive new advanced metrology patterning reticle and reference pattern collection, derived from SEMATECH AMAG’s AMAG4/5/6 and modernized to today’s metrology and processing community’s needs.
AMAG7 makes available short-loop wafers with the comprehensive AMAG7 patterned into various modern process levels at a contemporary foundry to make available leading-edge, mission-critical yet IP-neutral calibration samples/artifacts for metrology or processing R&D needs.

* SEM simulation software

AMAG nanometro's SimuSEM software simulates scanning electron microscope (SEM) images and electron interactions with solids.

SimuSEM's core simulation engine is NIST’s validated JMONSEL simulator, augmented with much faster performance, many additional materials, and numerous other improvements. SimuSEM provides a comprehensive 3D visualization system using the Blender application as an intuitive GUI.

SimuSEM can run on virtually any Windows PC or Linux system, including in-house servers and workstations, cloud servers, desktop PCs, or even laptops, with performance that scales with the number of available CPU cores.

* UV OZONE CLEANER (184&254nm) 

Surface cleaning equipment using UVC 184&254nm wavelengths

- Advantages of high intensity and efficiency by applying Grid Lamp

- We have products of various sizes, from small-sized products for R&D to large-area products, and we have various models ranging from products for LAB and automation products.

* UVA LED CURE SYSTEM (365 ~405nm) 

- UV Cure System using Long-life and high-output UV LED

- We have products of various sizes, from lab products to large-area models.

* The best microscopes for visual inspection.

- Microscope for computers (USB)

- Microscopes for High Definition Monitors & TV. (HDMI)