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scia Systems GmbH

Chemnitz,  Germany
http://www.scia-systems.com/
  • Booth: A204

scia Systems - Solutions for Thin Film Technology

Overview

scia Systems develops and manufactures equipment with complex plasma and ion beam technologies for ultra-precise surface processing. The systems are applicable for coating, etching, and cleaning processes, especially for the MEMS, microelectronics, and precision optics industries. Due to their flexible and modular design, the process equipment can be configured according to customer-specific requirements for research applications as well as high-volume production in either a "cluster" or "inline" configuration.

Our wide range of processing technologies includes etching processes, like Ion Beam Trimming, Ion Beam Milling, and Reactive Ion Etching, as well as coating processes, such as Ion Beam Sputtering, PECVD, and Magnetron Sputtering.

  Products

  • scia Cluster 200
    One system for all your processes! Whether you want multiple chambers dedicated to one process or want to combine our broad process know-how – we have the ideal cluster layout for you!...

    • One system for all your processes! Whether you want multiple chambers dedicated to one process or want to combine our broad process know-how – we have the ideal cluster layout for you!

    Your key advantages & benefits

    • High Flexibility
    • Cost & Footprint Reduction
    • Optimum Interfaces & Low Contamination
    • Increased Throughput
    • Best Usability

    Your choice of processes

    • Ion Beam Trimming (IBT)
    • (Reactive) Ion Beam Etching (RIBE)
    • (Dual) Ion Beam Deposition (DIBD)
    • Electron Beam Evaporation (EBE)
    • Atomic Layer Deposition (ALD)
    • Plasma Enhanced Chemical Vapor Deposition (PECVD)
    • Reactive Ion Etching (RIE)
    • Magnetron Sputtering

    Any questions left? For more information visit us on our booth.  Our team will be happy to help you find the optimal technology and system configurations for your manufacturing needs.

Categories

202 Equipment, General Use
  • Vacuum drying & out gassing Systems
    • 204 Equipment, Mems
  • Deep RIE etching; Dry Etching
    • 205 Equipment, Nanotechnology
  • Equipment, Nanotechnology Tools
    • 207 Equipment, Process
  • Coat; Develop; Resist Processing; Track Equipment
  • Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
  • Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
  • Etching; Stripping; Ashing - Dry and Wet Equipment
  • Ion; E-Beam Milling Etching Equipment
    • 400 Components, Parts & Accessories
  • Vacuum Systems Components & Accessories (optical monitors; Sputtering target fixtures; lubricants; p
    • 401 Sub-systems
  • Plasma Sources; Controls; Monitoring; Diagnosis


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