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ENTEGRIS
Suwon,
Gyeonggi-do
Korea (South)
http://www.entegris.com
Booth: D504
Categories
200 Equipment, Assembly
Cleaning; Washing Equipment for Assembly & Packaging
Device Handling; Feeding Systems
206 PV Equipment
Thin Film
Wafers
207 Equipment, Process
Chemical Mechanical Polishing (CMP); Electro Polishing, Mechanical Polishing Equipment
Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
Coat; Develop; Resist Processing; Track Equipment
Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
Environmental Enclosures; Minienvironments
Etching; Stripping; Ashing - Dry and Wet Equipment
Ion Implantation Equipment
Lithography; Exposure; Aligners; Direct Write Systems; Steppers; Scanners; Nanoimprint
Plating; Electro Chemical Plating; Deposition Systems
Spin on Glass (SOG); on Dielectric (SOD) Track systems
Transfer Systems for Wafer; Reticles or FPD's
301 Materials, Chemicals & Solids
Acids; Etchants
Buffers; Alkalis; Bases
Cleaning Chemicals; Solvents; Strippers
DI; UP Water
Dopants; liquid or solid
Other Specialty Chemicals
Photo Resist; Developers & Ancillaries (incl. Adhesion promoter (HMDS); Primer; Anti-Reflective Coat
Solids
Spin on glass material
Surface protection material; coatings
304 Materials, Mask Making
Mask and Reticle Handling Products
306 PV Materials
Consumables
Gases and Liquid Chemicals
307 Materials, Process
CMP; Grind; Lap; Polish; Abrasive materials
Photo Masks; Finished or Patterned
Process Chamber Components; Graphite; Carbon Fiber Carbon (CFC); Pyrolytic Boron Nitride (PBN)
308 Materials, Substrate
Compound Semiconductor substrates (GaAs on Silicon; GaN; InP; SiGe, etc.)
400 Components, Parts & Accessories
Filters, Getters, Purifiers, Catalysts for Gases
Flow Control Components - Valves; Meters; Gauges; Regulators; MFC's
Pipe; Tubing; Hose; Flanges; Connectors; Couplings; Plumbing Fittings
401 Sub-systems
Gas; Liquid delivery panels as subsystems
Pumps, for Fluids
Temperature Sensing; Control; Recirculators; Chillers; Heat Exchangers
500 Factory Monitoring & Control Systems (FMCS)
Chemical; Pure Water; Fluid Handling; Storage; Supply Systems
Chemical; Pure Water; Fluid Monitoring & Control Systems
Gas and Other Generation Systems
Gas Handling - Cabinets; Control; Supply Systems
Process Controls
501 HVAC, Temperature, Humidity, Contamination Control
Clean Rooms
Contamination Control; HEPA Filtering Systems
HVAC; Temperature; Humidity Systems and Control
701 Manufacturing Services or Consulting
Assembly
Clean Room; Contamination Control
Wafer Handling
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Appointment Date*
Wednesday, Jan 31 2024
Thursday, Feb 01 2024
Friday, Feb 02 2024
Start Time*
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End Time*
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Wed Jan, 31
Thu Feb, 01
Fri Feb, 02
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