ENTEGRIS

Suwon,  Gyeonggi-do 
Korea (South)
http://www.entegris.com
  • Booth: D504

Categories

200 Equipment, Assembly
  • Cleaning; Washing Equipment for Assembly & Packaging
  • Device Handling; Feeding Systems
    • 206 PV Equipment
  • Thin Film
  • Wafers
    • 207 Equipment, Process
  • Chemical Mechanical Polishing (CMP); Electro Polishing, Mechanical Polishing Equipment
  • Cleaning; Washing; Drying Equipment for Substrate, Fab Processing
  • Coat; Develop; Resist Processing; Track Equipment
  • Deposition; Chemical Vapor (CVD); MOCVD; PECVD; LPCVD; ALD; REALD; MVD
  • Deposition; Physical Vapor (PVD); Sputtering; Evaporation Equipment
  • Environmental Enclosures; Minienvironments
  • Etching; Stripping; Ashing - Dry and Wet Equipment
  • Ion Implantation Equipment
  • Lithography; Exposure; Aligners; Direct Write Systems; Steppers; Scanners; Nanoimprint
  • Plating; Electro Chemical Plating; Deposition Systems
  • Spin on Glass (SOG); on Dielectric (SOD) Track systems
  • Transfer Systems for Wafer; Reticles or FPD's
    • 301 Materials, Chemicals & Solids
  • Acids; Etchants
  • Buffers; Alkalis; Bases
  • Cleaning Chemicals; Solvents; Strippers
  • DI; UP Water
  • Dopants; liquid or solid
  • Other Specialty Chemicals
  • Photo Resist; Developers & Ancillaries (incl. Adhesion promoter (HMDS); Primer; Anti-Reflective Coat
  • Solids
  • Spin on glass material
  • Surface protection material; coatings
    • 304 Materials, Mask Making
  • Mask and Reticle Handling Products
    • 306 PV Materials
  • Consumables
  • Gases and Liquid Chemicals
    • 307 Materials, Process
  • CMP; Grind; Lap; Polish; Abrasive materials
  • Photo Masks; Finished or Patterned
  • Process Chamber Components; Graphite; Carbon Fiber Carbon (CFC); Pyrolytic Boron Nitride (PBN)
    • 308 Materials, Substrate
  • Compound Semiconductor substrates (GaAs on Silicon; GaN; InP; SiGe, etc.)
    • 400 Components, Parts & Accessories
  • Filters, Getters, Purifiers, Catalysts for Gases
  • Flow Control Components - Valves; Meters; Gauges; Regulators; MFC's
  • Pipe; Tubing; Hose; Flanges; Connectors; Couplings; Plumbing Fittings
    • 401 Sub-systems
  • Gas; Liquid delivery panels as subsystems
  • Pumps, for Fluids
  • Temperature Sensing; Control; Recirculators; Chillers; Heat Exchangers
    • 500 Factory Monitoring & Control Systems (FMCS)
  • Chemical; Pure Water; Fluid Handling; Storage; Supply Systems
  • Chemical; Pure Water; Fluid Monitoring & Control Systems
  • Gas and Other Generation Systems
  • Gas Handling - Cabinets; Control; Supply Systems
  • Process Controls
    • 501 HVAC, Temperature, Humidity, Contamination Control
  • Clean Rooms
  • Contamination Control; HEPA Filtering Systems
  • HVAC; Temperature; Humidity Systems and Control
    • 701 Manufacturing Services or Consulting
  • Assembly
  • Clean Room; Contamination Control
  • Wafer Handling
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