EQ GLOBAL

• RF Generator is a device that converts AC power into RF high-frequency power in the system that uses plasma during the semiconductor and display manufacturing process, and supplies power to make the reaction gas required for the process into plasma inside the chamber.
• EQ GLOBAL RF Generator is provided according to the conditions of each process such as various power and frequency, and the highest efficiency RF Generator is provided to customers through various functions.

• RF Matcher is a device that delivers maximum power by matching the impedance (50Ω) of the chamber and the RF power source in real time in the plasma system of the semiconductor and display process.
• EQ GLOBAL RF Matcher provides fast and accurate Matching Algorithm through efficient Sensor/Motor control, and provides customers with maximum efficiency of perfect Matching and Power.

• EQ Global's RF Filter effectively blocks the leakage of RF power applied to the chamber to realize uniform process quality and process time reduction.
• The RF Filter optimized through EQ Global's RF simulation technology provides the best solution to efficiently control the chamber process.

​