KITZ SCT CORPORATION

  • Booth: A428

Manufacture of UHP related equipments for semiconductor

Overview

As a part of the all-around valve manufacturer KITZ Group, KITZ SCT responds to customer requests with a system integrating the development, manufacture, sales, and servicing of fluid control devices and equipment such as valves for semiconductor processes.

In the constantly evolving electronics industry, we believe that value for our customers means well-timed, speedy proposals; we work to grow along with our customers through new product development and improved service.

As well, we guarantee product development and manufacturing with consideration for the global environment, based on environmental preservation and compliance management which take seriously the trust society has placed in us.

We appreciate your continued patronage.

President and CEO
Kasahara Mitsuo


  Products

  • KD Pneumatic diaphragm valves
    This is the flagship model for low-pressure diaphragms. This high-quality diaphragm valve supports high-purity gases for semiconductors....

  • Ports-Flow

    2Ports-Straight

    Connection Size (in)

    1/4"

    Connection Type

    M-CVC

    Cv

    0.27

    Minimum Fluid Temperature (Celsius)

    -10

    Maximum Fluid Temperature (Celsius)

    80

    Minimum Ambience Temperature (Celsius)

    -10

    Maximum Ambience Temperature (Celsius)

    60

    Maximum Operating Pressure (MPa)

    0.98

    Actuation

    NC

    Seat Material

    PCTFE

    Surface Finish

    EP

    Body Material

    316L

  • IVBH Heated Vacuum Isolation Valves Pneumatic
    This vacuum valve has a spiral heater mounted inside the bellows, enabling bellows heating whether the valve is open or closed. The valve is heated from within the bellows to eliminate cold spots and enable reduced adhesion of generated material....

  • Specification overview

    Size

    40A

    Operation

    NC

    Valve Shape

    Angle

    Connection

    ISO KF Flange NW

    Seat Material

    Fluorine Rubber

    Minimum Operating Pressure Pa(abs)

    1x10^-6

    Maximum Operating Pressure Pa(abs)

    2x10^5

    Controller Set Temperature (Celsius)

    External heater: 150 Internal heater: 180

    Body Material

    SUS304

    Bellows Material

    SUS316L

  • RD High pressure pneumatic valves 20.6MPa
    This is a high-pressure (20.6 MPa) specification diaphragm valve. This diaphragm valve supports high-purity gases for semiconductors....

  • Specification overview

    Ports-Flow

    2Ports-Straight

    Connection Size (in)

    1/4"

    Connection Type

    M-CVC

    Cv

    0.1

    Minimum Fluid Temperature (Celsius)

    -10

    Maximum Fluid Temperature (Celsius)

    42

    Minimum Ambience Temperature (Celsius)

    -10

    Maximum Ambience Temperature (Celsius)

    40

    Maximum Operating Pressure (MPa)

    20.6

    Actuation

    NC

    Seat Material

    PCTFE

    Surface Finish

    EP

    Body Material

    316L

  • IB compact pneumatic bellows valve
    This is a small-diameter bellows valve. Usable in exhaust system equipment as well as for gas supply....

  • Specification overview

    Ports-Flow

    2Ports-Straight

    Connection Size (in)

    1/4"

    Connection Type

    M-CVC

    Cv

    0.3

    Minimum Fluid Temperature (Celsius)

    -10

    Maximum Fluid Temperature (Celsius)

    100

    Minimum Ambience Temperature (Celsius)

    -10

    Maximum Ambience Temperature (Celsius)

    60

    Maximum Operating Pressure (MPa)

    0.98

    Actuation

    NC

    Seat Material

    PCTFE

    Bonnet Gasket

    PCTFE

    Surface Finish

    EP

    Body Material

    316L

  • IC Check valve
    This is a check valve with an SUS316L body. With a close-fit finish, it enables smooth opening and closing action....

  • Specification overview

    Ports-Flow

    2Ports-Straight

    Connection Size (in)

    1/4"

    Connection Type

    M-CVC

    Cracking Pressure (kpa)

    2.26

    Cv

    0.35

    Minimum Fluid Temperature (Celsius)

    -10

    Maximum Fluid Temperature (Celsius)

    80

    Minimum Ambience Temperature (Celsius)

    -10

    Maximum Ambience Temperature (Celsius)

    60

    Maximum Operating Pressure (MPa)

    16.2

    Seat Material

    FKM

    Surface Finish

    EP

    Body Material

    316L

  • Valves for ALD processes
    The TDF series are high-purity gas-compatible diaphragm valves that combine high-speed opening/closing operation, high durability, heat resistance, and Cv stability required for atomic layer deposition (ALD) and atomic layer etch (ALE) processes....

  • Features

    High-speed open/close and high-response stability

    Realizes valve response time of 18 ms* and response stability post-durability cycle of ±2 ms*.
    *Performance values with KITZ SCT testing methods

    Supports high-temperature fluids

    With a structure reducing thermal conduction to the actuator, high-temperature fluids up to maximum 220°C* can be used.
    *Up to 200°C with solenoid valves or sensors equipped

    Stable Cv values

    The use of a structure and seat material allowing for heat effects ensures Cv 0.5* at 220°C.
    *Cv value initial error and fluctuation rate during use within ±5%

    High durability

    ・ Our proprietary technology enables high-temperature fluids of 220°C and durability at 40 million cycles or more
    ・Achieves durability test performance values of 100 million cycles or more*.
    *KITZ SCT test performance (test conditions) with fluid: N2, sealing pressure: 0.25 MPa (G), gas contact temperature: 220°C