Loading...

Robots and Design Co., Ltd.

Yongin-city, Gyunggi-Do,  Korea (South)
http://www.rnd.re.kr
  • Booth: A200

Robot expert with full line-up of front to back-end process.

Overview

From our foundation in 1999, we lead the localization and manufacture of wafer transfer robot for semiconductor process tool. Through our continuous research and development, we provide the customized product in accordance with customer’s requirement. 

Developing more than 200 types of robots based on our own technologies and over 20 years of accumulated experience, we established the full product line-up for robots used   front-end to back-end process. 

We also provide the robots for industrial, educational and service use. With our technical basis of robot, we now expand our business to bio, Medi-bio device and dental milling system and spread our products to domestic as well as overseas partners. 

With the value of customer satisfaction as a top priority, we aim to become a global company in robot beyond Korea

  Products

  • WAFER TRANSFER ROBOT
    Designed to use in semiconductor wafer process tool to transfer the wafers. We have full product line-up covering from front-end to back-end process of semiconductor. We can also provide the customizing product in accordance with customer's requirement....

    • 반도체 이송용 로봇

    반도체 웨이퍼 공정 장비에 사용하기 위해 설계되었으며, 공정간 Wafer을 이송합니다. 전공정에서 후공정까지 모든 제품 라인업을 보유하고 있으며, 고객 요구사양에 맞는 맞춤도 제작 가능합니다.

  • FOUP OPENER
    It opens/closes the door of FOUP and let WTR transfer the wafer from FOUP. We have standard FOUP opener as well as N2 Purge one. We also have loaders to load/unload the various type of carriers such as open cassette, MAC, etc....

    • FOUP 의 door를 open/close 하여 장비 내 WTR가 FOUP 내부의 wafer를 이송할 수 있 도록 합니다. 표준 FOUP opener 외에 N2 purge 용 사양도 보유하고 있으며, Open cassette 등 다양한 carrier 용 loader 도 보유 하고 있습니다.
  • EFEM
    Attached to front side of semiconductor process equipment and mainly play a role in transferring wafer. It equips FOUP openers and wafer transfer robot inside. Our company can make EFEM with whole of our own products as a sole distributor....

    • 반도체 공정장비 앞단에 설치하여 wafer 이송을 하는 모듈입니다. FOUP opener 및 WTR을 내부에 탑재하고 있으며, 당사의 경우, 모두 자사 제품으로 구성하여 공급이 가능합니다. 
  • SMIF (Standard Mechanical Interface)
    SMIF is a SMIF-I/O that has pod cassette loading and unloading into a 150~200mm wafer processing and metrology tools. SMIF-LP provides capability for a wide variety of wafer fab tools and leads the industry in reduced cycle time and footprint....

    • SMIF는 인체공학적으로 설계된 I/O로 다양한 150~200mm wafer 가공 및 측정 계측 장비와 쉽게 통합되어, Pod cassette loading 및 unloading을 가능하게 합니다. Vacuum load-lock 장비 또는 장비 제조업체 판매용으로 적합하도록 설계되었습니다. SMIF-LP는 다양한 Wafer fab 장비에 SMIF 기능을 제공하며, 사이클 타임과 설치 면적을 감소의 효과를 누리실 수 있습니다.
  • SCARA ROBOT
    SCARA Robot transfers 300mm wafers (12”) swiftly and precisely with single/dual arm with 1 or 2 blades. It can be set on small space but has a wide motion range. 2 or 3 ports can be accessible without a transverse axis....

    • Scara Robot은 1~2개의 blade가 있는 Single/Dual arm을 사용하여 300mm의 12” Wafer를 빠르고 정확하게 이송하는 로봇입니다. 적은 설치 면적이므로 공간을 효율적으로 사용할 수 있고, 동작 범위가 넓어 transverse axis (track) 없이 2~3 port에 접근이 가능합니다 (3 port에 맞게 arm이 수정 되었을 시, 3 port도 가능합니다.) 사용자 요청에 따라 주문 제작이 가능합니다 (Long Scara 등 제작 가능)

    *Optional: Linear Track, Mapping Sensor

  • PRE-ALIGNERS
    Pre-aligners is a compact design integrated with a controller. It provides high accuracy and reliable repeatability. It is compatible with a 200mm/300mm wafer without any mechanical change (Edge grip type is only for 300mm)....

    • Pre-aligners는 컨트롤러와 통합된 컴팩트한 디자인으로 높은 정확도와 반복성(repeatability)을 자랑합니다. 다른 기계 조작 없이 200mm/300mm wafer와 호환이 가능합니다 (Edge grip type은 300mm 전용입니다).

Categories

207 Equipment, Process
  • Transfer Systems for Wafer; Reticles or FPD's
    • 401 Sub-systems
  • Motion control systems; Servo control systems & Components


    • Back to the Search
    Loading ...

    :
    :


    Legend
    Available Timeslot
    Scheduled Appointment
    Personal Appointments
    Appointment Request
    Blocked Timeslot
    Restricted Timeslot
    Cancelled
    Declined