One system for all your processes! Whether you want multiple chambers dedicated to one process or want to combine our broad process know-how – we have the ideal cluster layout for you!
Your key advantages & benefits
- High Flexibility
- Cost & Footprint Reduction
- Optimum Interfaces & Low Contamination
- Increased Throughput
- Best Usability
Your choice of processes
- Ion Beam Trimming (IBT)
- (Reactive) Ion Beam Etching (RIBE)
- (Dual) Ion Beam Deposition (DIBD)
- Electron Beam Evaporation (EBE)
- Atomic Layer Deposition (ALD)
- Plasma Enhanced Chemical Vapor Deposition (PECVD)
- Reactive Ion Etching (RIE)
- Magnetron Sputtering
Any questions left? For more information visit us on our booth. Our team will be happy to help you find the optimal technology and system configurations for your manufacturing needs.